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System Operation Manual

RAITH150

Version 4.0

Содержание 150

Страница 1: ...System Operation Manual RAITH150 Version 4 0...

Страница 2: ...Windows and Windows 2000 are the registered trademarks of Microsoft Inc AutoCAD DXF are the registered trademarks of Autodesk Inc Design CAD is the registered trademark of American Small Business Com...

Страница 3: ...7 2 4 Miscellaneous Precautions 10 3 Notes concerning Personal Computer 13 3 1 Operation system 13 3 2 Hardware 13 3 3 Software 13 3 4 Backup 14 4 Power on and off 15 4 1 Starting the instrument 15 4...

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Страница 5: ...it whenever necessary Contact directly Raith or your local representative whenever you are uncertain about operating your system 1 2 Notes cautions and warnings Stickers on the left column provide yo...

Страница 6: ...safety startup standby shutdown and bakeout procedures Information on the task oriented operation of the system as well as the user interface are given in separate documents You can read the manual fr...

Страница 7: ...face requirements and local codes regarding floor loading and earthquake safety 2 2 General precautions We request that you use the instrument in a proper manner and within the scope of its purpose Ne...

Страница 8: ...measured X radiation exceeds 1 Sv h at a distance of 0 1m from any surface of the system To insure this Do not remove the cover especially near the column Never attempt maintenance of any kind on the...

Страница 9: ...AC power source before performing service or maintenance Never attempt maintenance of any kind on the line voltage other than that described in this Operation manual Servicing the line voltage is res...

Страница 10: ...tection grid behind the electron optic column Servicing the bake out is restricted to service engineers Should you find that any of the stickers is missing on your instrument please notify us We will...

Страница 11: ...2 4 Miscellaneous Precautions 11 2 4 3 Corrosion Components are painted plated or otherwise treated to resist corrosion However the components must be handled and stored properly to prevent corrosion...

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Страница 13: ...ctivate a screen saver If you do so the displays may be disturbed or not visible and the system may not work normally or hang up If possible bring the system back into its ground state and if required...

Страница 14: ...software settings If you do so the system may not work normally and a service visit causing additional costs may be required 3 4 Backup Make sure that the system is backup on a regularly basis If you...

Страница 15: ...specification If existent and necessary turn on the water chiller STEP 2 Turn on the power switch at the rear side of the instrument Figure 1 Main switch connecting system to power outlet If this was...

Страница 16: ...enerator Piezo Controller Airlock Control Precision Stage Controller Laser Interferometer Source STEP 4 Switch on the Keithley pico ameter if necessary 4 1 2 Starting the column software STEP 1 Login...

Страница 17: ...e lithography software is starting automatically If not double click on the corresponding link on the desktop STEP 3 The login screen of the lithography software opens Select your assigned user or use...

Страница 18: ...ter Source was turned on just some minutes before In this case wait around 20 Minutes After the frequency is locked the stage can be switched to laser mode via the laser control window PROBLEM 2 The c...

Страница 19: ...enerator and reboot the Raith PC 4 3 Going into standby STEP 1 Turn off EHT STEP 2 Turn of the gun STEP 3 Close the both programs on column and lithography PC Shut down the both PC s STEP 4 Press the...

Страница 20: ...4 Power on and off 20 Figure 5 Power switch use red button for shut down STEP 6 On the back of the system rotate the MAINS switch to OFF...

Страница 21: ...rence As improvements to the system and software are made this document will be updated and redistributed Please consult a Raith engineer with any questions or comments 5 1 Column maintenance Performi...

Страница 22: ...e STEP 7 Turn off the EHT and the gun Keep column chamber valve open STEP 8 Remove high tension cable from column In order to avoid any misalignment of the gun head you should try not to exert any sid...

Страница 23: ...un on at all times to keep the beam current stable If the system will not be used for over 2 days or if power to the system must be turned off shut the gun off The lifetime of the filament is not effe...

Страница 24: ...ile to a new location for reference purposes If in doubt how to interpret the data email it to a Raith service engineer for analysis 5 3 Utility maintenance In the following some general maintenance r...

Страница 25: ...lders The most critical sample holder is the electrostatic chuck which will be described separately The other sample holders are less critical Please pay special attention when pre leveling the holder...

Страница 26: ...ce procedures like de fragmentation backup of data applying Service Packs and bug fixing should be done on a regular base Installing service packs and bug fixes include the operation systems as well a...