Raith 150, Руководство по эксплуатации системы

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4 Power on and off
16
Figure 3
Power
switch; use green
button for full power.
The column PC and the lithography PC are starting automatically. If
not turn them on. Further all the electrical components located in the
rack are starting automatically. Check if the follow hardware
components are turned on.
From top to button
•
Beam Blank Controller
•
High Speed Pattern Generator
•
Piezo Controller
•
Airlock Control
•
Precision Stage Controller
•
Laser Interferometer Source
STEP 4 ►
Switch on the Keithley pico-ameter if necessary.
4.1.2 Starting the column software
STEP 1 ►
Login at the windows system with your assigned user account or as
the user “training”, password “training”.
STEP 2 ►
The column software is starting automatically. If not, double click on
the corresponding link on the desktop. Wait till the LEO server has
been run up.
STEP 3 ►
Login at the column software with your assigned user account or as
the user “training”, password “training”.