Raith 150, Руководство по эксплуатации системы

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2.3 Operation, maintenance, service procedures
9
Overriding interlocks is dangerous and should never be done.
Never attempt maintenance of any kind on the high voltage other than
that described in this Operation manual.
Servicing the high voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.3 Line voltage
Line voltage up to 240 V AC may be present in various locations
within the system, even when the system or instrument is turned off.
Therefore,
Completely disconnect the unit from line voltage by disconnecting the
AC plug from the AC power source before performing service or
maintenance.
Never attempt maintenance of any kind on the line voltage other than
that described in this Operation manual.
Servicing the line voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.4 Pneumatic gate valve (RAITH150 only)
Your system uses a pneumatic gate valve for separating the load lock
from the chamber. Therefore,
Never put your arm or hands through the gate valve. They may get
bruised.
Never attempt maintenance of any kind on the gate valve other than
that described in this Operation manual.
Servicing the gate valve is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.