Table 5‑7. Frequency tuning parameters (Continued)
Parameter
Description
Command
High tuning
threshold
Sets the high tuning threshold. If the generator cannot
reach the low tuning threshold and it exceeds the
maximum tuning count, the target for the D changes to
the high tuning threshold.
Set:
118
,
subcommand
6
Report:
248
,
subcommand
6
Low tuning
threshold
Sets the low tuning threshold. After an initial delay, the
generator starts to adjust the frequency to minimize
parameter D for normal operation. The target for D is
the low tuning threshold.
Set:
118
,
subcommand
7
Report:
248
,
subcommand
7
Fixed frequency
Sets the unit frequency in Hz when the unit is in fixed
frequency mode. If this command is sent during
automatic tuning mode, then the generator will return
to this value only when fixed mode is initiated again.
Set:
61
Report:
161
Tuning time-out
The time that the generator will attempt to reach either
the high or the low tuning threshold during automatic
tuning. Once this time expires, the generator will
deliver error code
200
and turn RF off. If this value is
set to zero, the generator will continuously tune.
Set:
38
Report:
138
Tune delay (μs)
Sets the time in ms the generator waits after RF is
turned on before automatic tuning begins. RF output
remains fixed at start frequency until this time expires.
Actual tune delay is 10 ms longer than the parameter
value.
Set:
60
Report:
160
Tuning gain delay
Prevents the algorithm from increasing the frequency
step size immediately after changing the sign of the
frequency step. Increasing this number increases the
delay. Helps to prevent unstable tuning at high VSWR
or unstable plasma conditions.
Set:
118
,
subcommand
23
Report:
248
,
subcommand
23
Maximum tuning
count
Sets the number of intervals that the generator uses
when attempting to reach the low tuning threshold.
Set:
118
,
subcommand
8
Report:
248
,
subcommand
8
Step up gain
Sets the magnitude of frequency step increase when the
error is decreasing. A value of
n
sets the gain to 2
n
. The
default value is 2 (gain = 2
n
= 2
2
= 4).
Set:
118
,
subcommand
3
Report:
248
,
subcommand
3
Step down gain
Sets the magnitude of frequency step decrease when
the error is increasing. A value of 3 sets the gain to 2
-3
= 0.125.
Set:
118
,
subcommand
4
Report:
248
,
subcommand
4
Scan step size (Hz) This command is not active.
n/a
Advanced Energy
®
Paramount
®
MF 2 kW Generator
57020114-00E
Installation, Setup, and Operation
5‑26
Содержание Paramount MF 2 kW
Страница 2: ...Paramount MF 2 kW Generator User Manual January 2018 57020114 00E...
Страница 31: ...Figure 3 2 Pressure drop Advanced Energy Paramount MF 2 kW Generator 57020114 00E Specifications 3 12...
Страница 103: ...3710 Figure 5 5 Left side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 6...
Страница 105: ...3712 Figure 5 7 Top side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 8...