Table 3‑2. Electrical specifications (Continued)
Description
Specification
• Maximum 25%
Power accuracy
Pulse power level is the same as CW after pulse settling time.
Pulse to pulse jitter
Pulse length uncertainty (pulses can be longer than programmed):
Maximum 1 RF period (2.5 μs at 400 kHz)
Synchronization
Start of pulse is synchronized to the phase of the RF clock.
Pulsing into non 50 Ω Loads
Load is a fixed matching network loaded to the "plasma model", which is 30 Ω to 116 Ω resistor
in series with 1.1 nF capacitor.
Minimum on width
225 μs
Settling time
Less than 500 μs
Voltage overshoot
x 6 times (typical)
Pulse Sync In/Out
Frequency range
10 Hz to 2 kHz
Minimum on width must be satisfied.
Duty cycle
10% to 90%
Minimum on width must be satisfied.
Minimum on width
225 μs
Pulse
Sync In
RF pulse on high level
Z = 50 Ω
0 VDC to 5 VDC maximum
Pulse
Sync Out
RF pulse on high level
Z = 50 Ω source impedance
0 VDC to 5 VDC unloaded
0 VDC to 2.5 VDC across a 50 Ω load
Pulsed output timing
accuracy
1.0 μs edge uncertainty
RF Voltage/Power Detection Sampling
Sample delay
150 μs
Sample rate
36 μs sampling rate of voltage in voltage control mode
16 μs sampling rate of power in power control mode
Averaging
Control loop--averaging by integrator, readback--Moving average
of 8 samples
Advanced Energy
®
Paramount
®
MF 2 kW Generator
57020114-00E
Specifications
3‑8
Содержание Paramount MF 2 kW
Страница 2: ...Paramount MF 2 kW Generator User Manual January 2018 57020114 00E...
Страница 31: ...Figure 3 2 Pressure drop Advanced Energy Paramount MF 2 kW Generator 57020114 00E Specifications 3 12...
Страница 103: ...3710 Figure 5 5 Left side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 6...
Страница 105: ...3712 Figure 5 7 Top side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 8...