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Advanced Energy Paramount MF 2 kW, Руководство пользователя

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Table 5‑6. Recommended command sequence and timing (Continued)

 

Sequence description

Command sequence

• RF is off

• Unit is in voltage control

(DC bias) mode

• Forward power regulation

setting is active

4. Wait 10 ms.

5. Set pulse frequency at the 

Host

 port.

6. Wait 10 ms or wait for CSR code before sending next

command.

7. Set pulse duty cycle at the 

Host

 port.

8. Wait 5 ms.

9. Set power set point at the 

User

 port.

10. Wait 20 ms.

11. Turn RF ON at the 

User

 port.

FREQUENCY TUNING

Understanding Automatic Tuning and Sweep Frequency

The Paramount MF 2 kW generator has an automatic tuning feature, which allows a
generator to sweep through its frequencies until it optimizes power delivery and
minimizes load mismatch.

Different processes and chambers run with varying operating parameters. The
Paramount MF 2 kW generator delivers up to 2000 W from 360 kHz to 440 kHz (400
kHz ± 10%). To optimize the power being delivered, the Paramount MF 2 kW
generator uses an automatic tuning algorithm.

During tuning, the Paramount MF 2 kW generator minimizes parameter D, which is
calculated based on load impedance and quantifies the amount of load mismatch.

D can vary from 0 to 3000. If the generator is loaded to 50 Ω, D = 0. If the generator
is loaded to an open or short circuit, D = 3000.

RF ON TUNING

☞

 

Important

This description gives only basic information about automatic tuning. For
detailed information about automatic tuning, contact AE Global Services.

If automatic frequency tuning is enabled, the generator automatically tries to find the
best operating frequency. The best operating frequency is the frequency at which the
parameter D is at its lowest possible value (a small value of D corresponds to small
load mismatch when load impedance is close to 50 Ω).

Advanced Energy

®

Paramount

®

 MF 2 kW Generator

57020114-00E

Installation, Setup, and Operation

5‑23

Содержание Paramount MF 2 kW

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...Paramount MF 2 kW Generator User Manual January 2018 57020114 00E...

Страница 3: ...other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow ins...

Страница 4: ...based document design principles However improvement is ongoing and the writing staff welcomes and appreciates customer feedback Please send any comments on the content organization or format of this...

Страница 5: ...Circuit 1 5 Chapter 2 Product Overview Product Description 2 1 General Description 2 1 Theory of Operation 2 1 Operation Overview 2 1 Rectifier Module 2 2 Inverter Module 2 2 Isolation Transformer 2...

Страница 6: ...ions Transaction 4 17 T0 Host Transmits Message Packet 4 17 T1 Unit Verifies Host Transmission Packet 4 17 T2 Unit Transmits Response to Host 4 18 T3 Host Acknowledges Unit Response 4 18 AE Bus Commun...

Страница 7: ...Pulsing 5 27 Pulsing Parameters 5 28 To Set Up Master Slave Pulsing 5 28 To Enable Disable Pulsing and Set Pulsing Parameters 5 28 Safe Operating Area SOA Feature 5 29 Maintenance 5 29 Consumable Part...

Страница 8: ...Table 4 6 Default dip switch settings 4 13 Table 4 7 AE Bus address settings 4 13 Table 4 8 AE Bus byte structure 4 16 Table 4 9 AE Host command status response CSR codes 4 19 Table 4 10 AE Host comma...

Страница 9: ...OVERTEMP pins 22 and 9 4 10 Figure 4 12 DC BUS OK pins 24 and 11 4 10 Figure 4 13 Host port connector 4 11 Figure 4 14 Slide DIP switch 4 12 Figure 4 15 Graphic representation of a message packet 4 1...

Страница 10: ...specific levels of hazard seriousness DANGER DANGER indicates an imminently hazardous situation that if not avoided will result in death or serious injury DANGER is limited to the most extreme situati...

Страница 11: ...r on your unit CE label Complies with applicable European directives Protective conductor terminal This terminal must be connected first and be of proper type and size for the circuit with the highest...

Страница 12: ...f Conformity US or Declaration of Conformity EU accompanying the product NRTL Safety certified by CSA International a Nationally Recognized Testing Laboratory CE Marking Self declaration assessed by A...

Страница 13: ...in the specifications If this unit does not have a circuit breaker you must install and operate it with a circuit breaker switch on the AC input The circuit breaker switch must be easily accessible a...

Страница 14: ...erlocks in Advanced Energy products are not intended to meet or satisfy safety requirements Where interlocks exist you must still meet and satisfy safety requirements The presence of interlocks does n...

Страница 15: ...User Unit Interlock Interlock return Cable interlock Interlock relay Figure 1 1 Interlock circuit Advanced Energy Paramount MF 2 kW Generator 57020114 00E Safety and Product Compliance Guidelines 1 6...

Страница 16: ...ned range to minimize the load mismatch to the generator The DDS operating parameters on each generator are configured via the generator s serial communications interface and are stored indefinitely i...

Страница 17: ...the voltage across and the current through the device neither case represents a large power loss This makes the generator very efficient Isolation Transformer The inverter module produces a waveform w...

Страница 18: ...bility to control the amplitude of RF output voltage at the load with the use of the AE Low Frequency Fixed Match and voltage peak detector The voltage from the peak detector is supplied to the genera...

Страница 19: ...roduct of the voltages and currents Neither the forward nor the reflected power directly determine the process results Load Power The load power is the power actually dissipated in the load If the loa...

Страница 20: ...e rear of the unit for connections Connectors Cable Specifications RF output connector HN coaxial female TRU 8371 SNT Connector has an interlock which engages when output cable is fully connected AC p...

Страница 21: ...ification Bias V Out connector Coolant connectors water in and water out SS female Swagelok 3 8 on nickel plated brass panel Chassis ground terminal 10 32 stud with nut and star washer Advanced Energy...

Страница 22: ...ts specification Line voltage 208 VAC 10 187 VAC to 229 VAC Line frequency 50 Hz to 60 Hz nominal 47 Hz to 63 Hz Phase 3 with ground no neutral AC to RF efficiency Nominal 78 Low line AC 79 AC input p...

Страница 23: ...e voltage range Measured power accuracy is a combination of the generator and measurement equipment accuracy These specifications were created per an AE test measurement procedure Using alternate test...

Страница 24: ...on reactive load Load mismatch stability over full frequency and power range The generator will operate continuously into any load impedance without failure Short term output power drift operating int...

Страница 25: ...power incident upon the RF outputs from external sources load 50 W minimum between 2 MHz and 300 MHz Zero Low setpoint RF output is disabled if setpoint in power control mode is less than 5 W RF outpu...

Страница 26: ...439 6 kHz 1 kHz resolution Tune time 0 1 second from RF enabled at a preset frequency within 10 or 2 W of the minimum reflected power whichever is greater Typical tune time for factory set tuning par...

Страница 27: ...age overshoot x 6 times typical Pulse Sync In Out Frequency range 10 Hz to 2 kHz Minimum on width must be satisfied Duty cycle 10 to 90 Minimum on width must be satisfied Minimum on width 225 s Pulse...

Страница 28: ...m the AE Low Frequency Fixed Match Settling time is measured from the start of step disturbance to 90 change of the output voltage Sense Voltage In input characteristics Input specification for this S...

Страница 29: ...cation Accuracy of output voltage 0 7 or 80 mV accuracy is the difference between the digital signal sent to DAC and the actual output voltage The load impedance should be greater than 1 k Advanced En...

Страница 30: ...See the following pressure drop figure Contaminates AE recommends the following specifications for the water used to cool the Paramount MF 2 kW generator pH between 7 0 and 9 0 Total chlorine 20 ppm...

Страница 31: ...Figure 3 2 Pressure drop Advanced Energy Paramount MF 2 kW Generator 57020114 00E Specifications 3 12...

Страница 32: ...m3 to 29 g m 3 78 8 kPa to 106 kPa 788 mbar to 1060 mbar Equivalent altitude 2000 m to 500 m 6562 to 1640 Transportation 25 C to 70 C 13 F to 158 F 95 2 60 g m3 3 65 6 kPa to 106 kPa 656 mbar to 1060...

Страница 33: ...ted to the metal shells of the cable s connectors Additionally the chassis of the generator must be tied to a local earth ground through an adequately sized copper grounding strap Satisfying Minimal R...

Страница 34: ...pplied RF output will not automatically be activated Choose a control mode and then to activate RF output If you are in host control mode send an RF on command If you are in user control mode send an...

Страница 35: ...in 14 2 15 RFL PWR MONITOR Analog output This signal provides a linearly scaled readback of reflected power 0 V 0 W 10 V 1500 W See Figure 4 2 on page 4 6 for the wiring diagram 3 16 FWD LOAD PWR MONI...

Страница 36: ...0 V to 10 V 0 V to 2000 V peak to peak See Figure 4 5 on page 4 7 for the wiring diagram 6 19 DC BIAS POWER REGULATION Digital input This pin switches the regulation mode of the generator When logic...

Страница 37: ...OK RETURN Digital output See pin 24 12 Not connected 13 21 15 VDC Analog output User voltage for interface purposes Rated 400 mA maximum Short circuit protected See Figure 4 9 on page 4 9 for the wiri...

Страница 38: ...in 10 24 11 DC BUS OK Digital output When the interlocks are satisfied and no faults are present a low opto coupler output impedance is created between this pin and pin 11 See Figure 4 12 on page 4 10...

Страница 39: ...ure 4 3 FWD LOAD PWR MONITOR pins 3 and 16 3394 4 17 3 3 V 3 3 V User Unit 4 V to 25 V Current Limiter 11 mA Figure 4 4 RF PWR ON pins 4 and 17 3035 _ 15 V 15 V 15 V 15 V 18 5 100 K See pin descriptio...

Страница 40: ...er 11 mA Figure 4 6 DC BIAS POWER REGULATION pins 6 and 19 3396 8 21 4 V to 25 V User Unit Current Limiter 11 mA Figure 4 7 FWD LOAD PWR REGULATION pins 8 and 21 Advanced Energy Paramount MF 2 kW Gene...

Страница 41: ...ERLOCK LOOP pins 23 and 10 3045 Unit 15 V 13 21 15 V provided to user Figure 4 9 15 VDC pins 13 and 21 3040 14 1 1000 pF User Unit 5 V 2 K TTL or CMOS input Figure 4 10 SET POINT STATUS pins 14 and 1...

Страница 42: ...face through the Host port This interface allows the Paramount MF 2 kW unit to interface with a host computer using the AE Bus protocol To obtain a basic sample of host software for the Host port plea...

Страница 43: ...2 transmit data 3 RX RS232 RS 232 receive data 4 RESERVED Reserved for future use 5 COM Data common 6 RESERVED Reserved for future use 7 RESERVED Reserved for future use 8 RESERVED Reserved for future...

Страница 44: ...he receive pin RX RS 232 on the host computer s serial connector The receive pin is normally pin 2 for a standard 9 pin serial port Host Port DIP Switches DIP SWITCH AND SWITCH SETTINGS Use the DIP sw...

Страница 45: ...osition on on on on off on off on SETTING THE UNIT AE BUS ADDRESS Use the DIP switch to set the unit AE Bus address Table 4 7 AE Bus address settings Address Switch 1 Switch 2 Switch 3 Switch 4 Switch...

Страница 46: ...26 Off Off On Off On 27 Off Off On Off Off 28 Off Off Off On On 29 Off Off Off On Off 30 Off Off Off Off On 31 Off Off Off Off Off AE Bus Protocol The AE Bus protocol uses pure binary data nothing is...

Страница 47: ...s 3 to 7 which allows a total of 32 distinct addresses Address 0 zero is reserved for the network broadcast address which the Paramount MF 2 kW unit does not support The remaining three bits bits 0 1...

Страница 48: ...bits 0 1 and 2 of the header field is 0 to 6 the Paramount MF 2 kW unit expects 0 to 6 data bytes However if the value in the header field is 7 07h the Paramount MF 2 kW unit looks for the optional le...

Страница 49: ...ket to the Paramount MF 2 kW unit The packet contains one of the following A command that requests data or status information A command and data that change a parameter setting An executable command T...

Страница 50: ...puter receives no response within a reasonable period it takes whatever action it has been programmed to take T2 UNIT TRANSMITS RESPONSE TO HOST The Paramount MF 2 kW unit prepares a response packet w...

Страница 51: ...ough 255 it responds with a command status response CSR code The CSR is a single byte number that indicates whether the unit accepted or rejected the command and in the case of rejection the reason th...

Страница 52: ...sponse indicates whether the unit has accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command Commands 128 through 255 request information fr...

Страница 53: ...wer Send 2 data bytes 16 bit value Power limit in watts Command 169 reports this value 2 1 5 set user reflected power limit Sets the user reflected power limit in watts The user reflected power limit...

Страница 54: ...a bytes 16 bit value 0 Restore all default values 2 1 8 set power setpoint Sets a power setpoint in watts Sets a setpoint in volts when operating in external DC bias regulation mode Setpoint cannot be...

Страница 55: ...trol mode Sets the control mode This mode cannot be changed while the output is on Send 1 data byte 8 bit value 2 Host 4 User port analog 8 Diagnostic Command 155 reports this value 1 1 26 set pulsing...

Страница 56: ...Master mode 2 Slave mode Bytes 4 and 5 Reserved Command 172 B0 1 reports these values 6 1 26 enable pulse sync output subcommand 2 Enables or disables pulse sync output Send 6 data bytes Bytes 0 and...

Страница 57: ...and parameters or set the ramping memory mode Ramping Mode and Parameters In W s mode the ramp parameters represent the ramp rate in watts per second The acceptable range for the ramp up and ramp down...

Страница 58: ...in ms Bytes 6 and 7 Ramp down in W s or time in ms To set the memory mode Bytes 0 and 1 2 set memory mode Byte 2 and 3 Memory mode 0 RAM 1 NVRAM Bytes 4 through 7 0 Command 151 reports this value 38...

Страница 59: ...5 ms The unit stores the watchdog timer value internally in 10 ms increments and truncates any fractional remainder The unit accepts a value from 1 to 9 but stores it as a time out period of 10 ms Sen...

Страница 60: ...1 45 set maximum tuning frequency Sets the maximum frequency that the generator uses for automatic tuning The unit stores this parameter in nonvolatile memory You cannot change this setting while out...

Страница 61: ...ly set fixed frequency Changing to sweep frequency mode causes the unit to output the start frequency first and then to begin sweeping according to the tuning algorithm The default setting is sweep fr...

Страница 62: ...ut is on when operating in the fixed frequency mode The fixed frequency value must be within the unit frequency range For units that allow you to set the fixed frequency memory mode see command 118 B0...

Страница 63: ...7 Saturday Byte 4 Date valid values are 1 to 31 Byte 5 Month valid values are 1 to 12 Byte 6 Year valid values are 00 to 99 Command 215 reports this value 93 set pulsing frequency Sets the RF pulsing...

Страница 64: ...ulsing frequency in Hz Command 193 reports this value 95 set diagnostic command Controls the diagnostic self test The unit must be in diagnostic control mode before using this command see command 14 S...

Страница 65: ...time Setting this value to 0 disables pulsing This command is valid only when operating in master mode When operating in slave mode this command returns CSR 12 Feature Not Available Send 2 data bytes...

Страница 66: ...0 and 1 1 set frequency step minimum Bytes 2 through 5 Frequency step minimum Command 248 reports this value B0 1 6 1 118 set frequency step maximum NV subcommand 2 Sets the frequency tuning frequency...

Страница 67: ...criteria less than the low threshold The generator also uses this value as the threshold to determine when to begin retuning Valid values for gamma threshold high must be greater than or equal to gamm...

Страница 68: ...ts the tuning step time This command is not available while the RF output is on The range of valid values is from 8 s to 4096 s The resolution for setting tuning step time is 16 s The unit rounds all...

Страница 69: ...setting for external regulation mode allow you to set the power limit to either forward or delivered power SOA mode Enables disables the safe operating area feature Memory mode Sets whether these sett...

Страница 70: ...aults to the factory default fixed frequency setting or last setting if changed from the factory default See product specification for the fixed frequency factory default setting The factory default s...

Страница 71: ...pply size formatted to four ASCII characters Optional Send 1 data byte with a value of 0 Returns six data bytes Power supply size formatted to six ASCII characters right justified 0 or 1 4 or 6 ASCII...

Страница 72: ...owed to tune without finding a match before it turns off RF output and activates a fault The maximum tuning time out value is 60 000 ms A value of 0 disables the tuning time out feature causing the ge...

Страница 73: ...lues is from 2 to 500 representing 20 ms to 5 00 seconds Returns 2 data bytes 16 bit value Bytes 0 and 1 Host port time out value Set this value with command 40 0 2 144 report minimum tuning frequency...

Страница 74: ...Returns frequency in kHz 1 Returns frequency in Hz Returns 4 data bytes Frequency in kHz or Hz Set this value with command 45 0 or 1 4 146 report tuning start frequency Reports the frequency in kHz at...

Страница 75: ...variable mode if the output is off when you send this command the unit reports the frequency that it will first output the next time you turn the unit on Send 0 data bytes to return frequency in kHz...

Страница 76: ...ing mode and parameters or the ramping memory mode Ramping Mode and Parameters The ramp up and ramp down parameters are independent In W s mode the ramp parameters represent the ramp rate in watts per...

Страница 77: ...a value of 1 Get ramp data Bytes 0 and 1 1 Ramp mode and parameter data selection Bytes 2 and 3 Ramp mode 0 Disabled 1 W s 2 ms Bytes 4 and 5 Ramp up in W s or time in ms Bytes 6 and 7 Ramp down in W...

Страница 78: ...ctive control mode Send 0 or 1 data bytes Send 0 data bytes Returns 1 data byte 8 bit value 2 Host 4 User port analog 8 Diagnostic Optional Send 1 data byte with a value of 0 Returns 2 data bytes 16 b...

Страница 79: ...s 4 data bytes Bytes 0 through 3 Time in ms Set this value with command 60 0 4 161 report fixed frequency Reports the output frequency when the generator is operating in fixed frequency mode The fixed...

Страница 80: ...this value with command 61 162 report process status Reports the generator process status Returns 4 data bytes four 8 bit flags Byte 0 Bit 0 Tuning status 0 Not tuned 1 Tuned Bit 1 setpoint ramping 0...

Страница 81: ...Bit 6 Warning present 0 No warnings 1 Warnings exist Bit 7 Reserved When either of the fault present or warning present bits are set one or more active or latched faults or warnings currently exist i...

Страница 82: ...d power in watts Returns 2 data bytes 16 bit value Bytes 0 and 1 Reflected power Set this value with command 5 0 2 167 report delivered power Reports the delivered power in watts Returns 2 data bytes...

Страница 83: ...Bytes 0 and 1 User reflected power limit Set this value with command 5 0 2 171 report DC bias external feedback limit Reports the DC bias value when operating in external DC bias regulation mode Send...

Страница 84: ...port memory mode 2 4 172 report pulsing mode subcommand 1 Reports whether the unit is set to master or slave pulsing mode Send 2 data bytes Bytes 0 and 1 1 report pulsing mode Returns 4 data bytes Byt...

Страница 85: ...in either volatile or nonvolatile memory depending on the current memory mode see command 26 The unit reports the value from the currently active memory This command is available in both master and sl...

Страница 86: ...ero data bytes it returns the Coldfire application firmware revision Sending 1 data byte allows you to select the software for which the revision will be returned Send 1 data byte 8 bit value Byte 0 S...

Страница 87: ...umber of overtemperature events stored in nonvolatile memory The unit increments the number of overtemperature events each time the coldplate temperature exceeds the fault threshold Returns 4 data byt...

Страница 88: ...ears up to 2100 Returns 7 data bytes 8 bit values Byte 0 Seconds valid values are 0 to 59 Byte 1 Minutes valid values are 0 to 59 Byte 2 Hours valid values are 0 to 23 Byte 3 Day of the week valid val...

Страница 89: ...dance in hundredths of ohms see command 225 Bytes 16 through 19 32 bit value Actual frequency in kHz see command 147 Bytes 20 through 23 four 8 bit values Process status see command 162 Byte 24 8 bit...

Страница 90: ...nd 0 data bytes reports the unit serial number if you send 1 data byte you can request either the unit serial number or the unit part number Send 0 data bytes Returns 4 data bytes 32 bit value represe...

Страница 91: ...to send subcommands that report a variety of operating parameters Send a value in the first two bytes that selects the parameter to report The subcommands are 16 bit commands ranging in value from 1 t...

Страница 92: ...ta bytes Bytes 0 through 3 Frequency step minimum in Hz unsigned long Set this value with command 118 B0 1 2 4 248 report frequency step maximum subcommand 2 Reports the frequency step maximum used du...

Страница 93: ...of n sets the gain to 2 n Send 2 data bytes Bytes 0 and 1 4 report step down gain Returns 4 data bytes Bytes 0 through 3 Step down gain unsigned short Set this value with command 118 B0 4 2 4 248 rep...

Страница 94: ...B0 7 2 2 248 report maximum tuning count subcommand 8 Reports the maximum tuning count used during the tuning process This reports the number of attempts to tune to the low threshold before giving up...

Страница 95: ...ally set value as a maximum output power limit In units without this feature this parameter is hard coded to limit forward power This feature allows you to set the power limit to either forward or del...

Страница 96: ...118 B0 50 248 report fixed frequency memory mode subcommand 51 Reports the setting of the fixed frequency memory mode either volatile or nonvolatile When set to volatile the fixed frequency defaults t...

Страница 97: ...ytes Returned Send 2 data bytes Bytes 0 and 1 51 report fixed frequency memory mode Returns 2 data bytes Bytes 0 and 1 Mode setting 0 Volatile 1 Nonvolatile Set this value with command 118 B0 51 Advan...

Страница 98: ...allation ensure that there are supports at the front and the rear of the unit Do not use the rack ears to support the weight of the unit The lifting brackets can be removed before installation if you...

Страница 99: ...Unit Drawings Status LEDs Digital display Generator LEDs Figure 5 1 Front panel Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 2...

Страница 100: ...ltage Out Ethernet connector SMA connector Sense Voltage In 25 Pin D sub User 9 Pin D sub Host 3 8 Swagelok female water cooling ports Air intake vents RF Output connector cover RF Output HN connector...

Страница 101: ...5 3 73 mm 0 15 178 0 mm 7 01 48 06 mm 1 89 433 50 mm 17 07 3 13 mm 0 123 382 78 mm 15 07 4088 Figure 5 3 Rear panel with dimensions Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installatio...

Страница 102: ...4087 Figure 5 4 Rear panel three dimensional Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 5...

Страница 103: ...3710 Figure 5 5 Left side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 6...

Страница 104: ...498 35 mm 19 62 44 96 mm 1 77 51 05 mm 2 01 3711 226 31 mm 8 91 Figure 5 6 Right side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 7...

Страница 105: ...3712 Figure 5 7 Top side Advanced Energy Paramount MF 2 kW Generator 57020114 00E Installation Setup and Operation 5 8...

Страница 106: ...ing to the following requirements DANGER RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input power before working on this unit or anything connected to it Advanced Energy...

Страница 107: ...signs of shipping damage contact Advanced Energy and the carrier immediately Save the shipping container for submitting necessary claims to the carrier INSTALLING THE UNIT Grounding WARNING Do not att...

Страница 108: ...ll units meets the unit specifications CAUTION Do not use deionized water for cooling purposes Deionized water causes both corrosion and erosion of cooling manifolds CAUTION Do not apply more than 54...

Страница 109: ...the output power cable through the output power connector cover and connect the output power cable connector to the output power connector on the unit Make sure to thread the connection carefully and...

Страница 110: ...on back of unit Table 5 1 HARTING 70 A connector pin descriptions Pin Description A1 Phase A2 Phase B1 Phase B2 Not connected Gnd Ground The parts listed in the following table are those used on the P...

Страница 111: ...ker switch must be easily accessible and near the device CAUTION This equipment is intended for use with a single source of 3 phase power with all phases vectored at 120 angles 5 If the equipment is u...

Страница 112: ...st Allows serial communications with a computer using AE Bus communications protocol AE Bus Host Interface Connecting For External Voltage Regulation Mode In external voltage regulation mode also refe...

Страница 113: ...put If input voltage is pulsing with pulsing RF output voltage is constant DC FRONT PANEL FUNCTIONS Using the Front Panel to Monitor Unit Status and Unit Operating Data Figure 5 11 Front panel display...

Страница 114: ...splay Status LED Indicators Table 5 4 Status LED indicators Status LED Description AC On When lit this green LED indicates that AC power is on RF On When lit this green LED indicates that RF power is...

Страница 115: ...lue Description Forward Power Displays forward power in watts Reflected Power Displays reflected power in watts Load Power Displays load power in watts External Volts Displays voltage on the SMA conne...

Страница 116: ...ld be set at 20 V or more To Operate the Unit for the First Time 1 Install the generator according to the installation procedures in this user manual 2 Turn on the circuit breaker supplying AC input p...

Страница 117: ...ntrol mode the RF POWER ON signal is Host port command 2 To enable RF with command 2 a high level signal should be present on pins 4 and 17 of the User port The unit is now ready for normal operation...

Страница 118: ...lation mode Set point is zero 3 Issue commands in this order from the indicated interface 1 Set to power regulation mode at the User port 2 Wait 10 ms 3 Set to load power regulation at the User port 4...

Страница 119: ...10 ms 5 Set voltage set point at the User port To set the unit to voltage control DC bias mode with a set point and leave RF off when RF is on 7 Issue commands in this order from the indicated interf...

Страница 120: ...rs up to 2000 W from 360 kHz to 440 kHz 400 kHz 10 To optimize the power being delivered the Paramount MF 2 kW generator uses an automatic tuning algorithm During tuning the Paramount MF 2 kW generato...

Страница 121: ...old and the tune time exceeds the tuning time out the generator delivers error code 200 Unable to Tune We recommend a very low value for the low tuning threshold and a very high value for the high tun...

Страница 122: ...requency limit for automatic tuning Does not affect the range of manual frequency setting Set 44 Report 144 Maximum frequency kHz Sets the high frequency limit for automatic tuning Does not affect the...

Страница 123: ...ill continuously tune Set 38 Report 138 Tune delay s Sets the time in ms the generator waits after RF is turned on before automatic tuning begins RF output remains fixed at start frequency until this...

Страница 124: ...enerator remembers inverter settings When the next RF on event happens RF comes on with the same power setting as the end of the previous pulse Power control loop becomes active 150 s after the start...

Страница 125: ...aster Slave Pulsing To prepare for master slave operation you need a coaxial cable 1 Make sure that RF output is off 2 Connect one end of the coaxial cable to the Pulse Out connector SMA on the unit t...

Страница 126: ...lookup table to limit that is to foldback power output to prevent exceeding programmed limits This lookup table is stored in flash memory independent of firmware The programmed limits in the lookup ta...

Страница 127: ...al temperature of the unit exceeds 65 C 149 F Turn AC power off and let the unit cool down Also there could be an external AC line fault Verify that there is AC voltage on the pins of the connector th...

Страница 128: ...erify that set point is set at 20 V or more 5 Is the POWER LIMIT LED lit If no go to next step If yes see To Troubleshoot Set Point Problems on page 6 3 6 Turn the unit off Verify that the unit has be...

Страница 129: ...If it is 2000 V this indicates a problem with the cable open If it is 0 V the cable may have an internal short 3 Inspect and evaluate the unit s RF output connector output cable tuner and chamber Look...

Страница 130: ...ach an RF shorting cap An RF shorting cap is a cap that provides an short RF connection To obtain an RF shorting cap contact AE Global Services d Install the RF output connector cover 4 Restore AC pow...

Страница 131: ...each for about one second If there is only one error code it is displayed continuously You can use serial communication to request a report of active warning or fault error codes command 223 Once you...

Страница 132: ...g Warnings Warnings self clear when the condition that caused the warning clears If a warning occurs while output is on output remains on Warning and Fault Code Tables The Paramount MF 2 kW generator...

Страница 133: ...lobal Services 50 DC Bus Low Warning Non latching warning AC line voltage is low Verify that AC line voltage meets specifications If the warning persists contact AE Global Services 70 Auxiliary Temper...

Страница 134: ...re are met If the warning persists contact AE Global Services 74 SOA Protection Warning Output power is being folded back to prevent the unit from exceeding the safe operating area SOA Check the proce...

Страница 135: ...Global Services 323 UART 3 Receive Error Warning Non latching warning Serial communication hardware problem Cycle AC power to the unit If the warning persists contact AE Global Services FAULT CODES F...

Страница 136: ...the unit If the fault persists contact AE Global Services 28 NOVRAM Fixed Store Fault Internal unrecoverable fault Cycle AC power to the unit If the fault persists contact AE Global Services 29 NOVRAM...

Страница 137: ...ate and temperature might be out of specification Water might be flowing in the wrong direction Water temperature is rising too fast Verify that coolant specifications for flow rate and maximum temper...

Страница 138: ...the rear panel 2 Verify that there is no obstruction within 100 mm 4 of the air inlet panel on the back of the unit If the fault persists contact AE Global Services 71 Auxiliary Cap bank Temperature F...

Страница 139: ...l AC cable might be faulty Verify that loaded AC line voltage meets specifications Verify that AC cable is intact and functioning If the fault persists contact AE Global Services 200 Unable To Tune Fa...

Страница 140: ...er to the unit If the fault persists contact AE Global Services 1004 AEBus Master Message Queue Overflow Fault Internal unrecoverable fault Serial communication hardware problem Cycle AC power to the...

Страница 141: ...com Thermal product support Contact by phone or email 1 360 694 7871 mailto thermalapplications aei com Power Control Module product support Contact by phone or email 49 0 2902 910370 10 technical sup...

Страница 142: ...le at no charge Purging Water for Transport or Storage Before transporting or storing water cooled units you must first purge water from the unit Failure to do so can result in damage to the unit and...

Страница 143: ...etuning 5 23 when turning RF on 5 23 B baud rate AE Bus 4 11 C cabling requirements 25 pin User port 4 1 certification 1 3 checksum byte AE Bus 4 16 command number byte AE Bus 4 15 commands action 4 2...

Страница 144: ...ssion parameters 4 11 I icons in user manual 1 1 on unit 1 2 industry guidelines compliance with 1 3 input power connecting 5 13 HARTING connector 5 13 installation command sequence recommendation 5 2...

Страница 145: ...g 5 28 setting up 5 28 R rear panel drawing 5 2 reflected power theory 2 3 returns 6 16 S safe operating area SOA feature 5 29 safety conditions of use 1 4 directives and standards 1 3 guidelines 1 1...

Страница 146: ...ls and icons used 1 1 User port 25 pin connector 4 1 introduction 4 1 signal descriptions 4 2 W warning see error codes types 6 5 warranty authorized returns 6 16 water prepare for storage 6 16 prepar...

Страница 147: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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