Software Setup/
Setting the System Configuration
V .
MAINTENANCE
V.
1 - 7
Page
4.
Click the [Z Stage] icon in [User Settings] to display the [Z Stage] panel in the front
position, and check and set the presence of motor controller, positioning of the
motor controller, backlash and moving amount of the Z motor.
The [Maximum range for Z series (mm)] text box accepts a setting value
between 1.0 and 3.0 (mm).
The values in the [Start Z] and [Stop Z] text boxes in the [Z Stage] sub-
panel are set according to the value set there.
For example:
When “1.0” (mm) is set as the maximum range for Z series, the minimum
value for Z starting becomes -500 (
P
m) and the maximum value for Z
stopping becomes 500 (
P
m).
Set the backlash of motor operation
in the [Z Stage] sub-panel.
Set the backlash during scanning
involving the Z stage.
Set the range where the stage can
move during the Z motor operation.
TIP
Set the moving amount assigned to
the <Z stage coarse adjustment>
buttons.
Set the moving amount assigned to
the <Z stage fine adjustment>
buttons.
[Z Stage] icon
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