Ulvac DC-10-4P, Руководство по эксплуатации

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DC Pulse Power Supply
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DC-10-4P
】 4 DESCRIPTION OF FUNCTIONS
32
4-7. Description of oscillation mode function
The oscillation mode includes: Continuous mode; One-pulse mode; and DC mode.
・ Continuous mode
Outputs specified frequency and inversion pulse width.
The charge-up of the target is controlled by producing the reverse-pulse output continuously.
0V
0A
t 時間
電圧
電流
Oscillation frequency
逆パルス幅
Figure 4-4: Image of waveform in continuous mode
・ One-pulse mode （ 1PLS ）
Produces a DC output normally, but produces a reverse-pulse output with respect to the pulse
width specified when an ARC is detected.
0V
0A
t 時間
電圧
電流
ARC occurred
逆パルス幅
Figure 4-5: Image of waveform in one-pulse mode
Voltage
Current
Inversion pulse width
Time: t
Inversion pulse width
Voltage
Current
Time: t