Ulvac DC-10-4P, Руководство по эксплуатации

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DC Pulse Power Supply
【
DC-10-4P
】 3 PREPARATION
18
3-4-2. Name definition of power supply with M/S connected
The name of each power supply with M/S connected is as shown in Table 3-3.
Table 3-3: Name of each power supply with M/S connected
Number of connected units Name
1st unit
Master
2nd unit
Slave1
・
・
・
・
5th unit Slave4
6th unit Slave5
3-4-3. M/S settings
The settings need to be made according to the power supply system configuration.
The M/S configuration switch in Fig. 3-4 needs to be set to its corresponding point.
Selecting “6” or its subsequent ones displays MODULE ERROR.
Setting the M/S configuration switch to the same point with different power supplies also displays
MODULE ERROR.
* Be sure to make the settings before starting DC. Any changes to the M/S setting switch after starting DC are not
applied. If the setting switch is changed, set the DC inputs again.
Master時
0
1
2
3
4
5
67
8 9
Slave1 Slave5
・・・・・・・・・・・・・・
0：Master
1：Slave1
2：Slave2
・
・
4：Slave4
5：Slave5
A
B
C
D
E
F
0
1
2
3
4
5
67
8 9A
B
C
D
E
F
0
1
2
3
4
5
67
8 9A
B
C
D
E
F
Figure 3-6: Setup of back switch of power supply in M/S
When setting the back switch, kill the upper-stream breaker and make the
settings using the supplied insulated screwdriver for the M/S setting or a
precision screwdriver with an insulation property.
This power supply uses high voltage. So do not put the screwdriver in other
than the switch.
3-4-4. Setting on front panel in M/S
When making an M/S connection, the number of units for use needs to be set on the front panel of
the master unit.
For instructions to make the settings, see the section (page 31) for UNIT in 5-1-4 MENU screen.
If the numbers of connected units and the setup units are not matching, the output is disabled with
the generation of "M/S SETTING WARNING."
WARNING
At Master