Ulvac DC-10-4P, Руководство по эксплуатации

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DC Pulse Power Supply
【
DC-10-4P
】 4 DESCRIPTION OF FUNCTIONS
36
4-9. Description of inter-pulse ARC function
In the continuous mode, if an ARC is detected while the reverse pulse operation is not working, the
ARC is erased by outputting the reverse pulse.
After detecting an ARC once, if an ARC is detected within the time when the shutdown of the second
and the following times (PARC/ENBL) is validated, the reverse pulse output is produced with the
shutdown time of the second and the following times (PARC/2nd). If the validated time of shutdown
for the second and the following times is over (PARC/ENBL), the reverse pulse output is produced
with the shutdown time of the first time (PARC/1st) again.
0V
0A
Time t
Voltage
Current
ARC occurred
* Voltage Detection level
*Current detection
level
* Although there is no sign in the parameter for the voltage detection level, the actual output is marked
in negative (minus).
Figure 4-7. Image of waveform in ARC
0V
0A
t 時間
電圧
電流
ARC occurred
遮断時間①
(PARC/1st)
0V
0A
t 時間
電圧
電流
ARC occurred
遮断時間②
(PARC/2nd)
ARC occurred
遮断時間①
(PARC/1st)
At the occurrence of single ARC At the occurrence of continuous ARC
Figure 4-8: Image of waveform of inter-pulse ARC extinguishing function
0V
0A
t 時間
電圧
電流
Interruption time ①
Interruption time
②
Interruption time ② Interruption time ①
ARC
occurred
ARC
occurred
ARC
occurred
ARC
occurred
2nd effective time (PARC/ENBL)
Description of interruption effective time at the 2nd and the subsequent points
Figure 4-9: Image of waveform of inter-pulse ARC extinguishing function
Interruption time ①
(PARC/1st)
Interruption time ①
(PARC/1st)
Interruption time ①
(PARC/2nd)
Voltage
Current
Current
Voltage
Time: t
Time: t
Voltage
Current
Time: t