DC Pulse Power Supply
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DC-10-4P
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2
OVERVIEW
3
2.OVERVIEW
This chapter describes features, composition, and
specifications of this product.
2-1. Introduction
DC-10-4P is designed as a DC pulse power supply of producing 10kW output for sputtering with 400V
input specifications.
Due to the charging-up by reactive sputtering etc., this product is effective on a load to which a normal
DC sputtering cannot respond.
The rated power can be supplied to the load by optimizing the load impedance of plasma.
2-2. Features
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Depending on the application, three oscillation modes are available on the front panel.
"Continuous mode":
Outputs the inversion pulse in the set cycle.
"One pulse mode":
Outputs inversion pulse when an unusual electrical discharge (hereinafter
referred to as ARC) is detected.
"DC mode":
Outputs a DC output without outputting a reverse pulse. When an ARC is
generated, only the inverter is stopped.
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On the continuous mode, the oscillated frequency from 5 to 250 kHz can be used.
The steps of frequency possible to set are as follows:
From 5 to 150 kHz : Unit of one kHz
From 150 to 250 kHz : Unit of five kHz
(For the relationship between the oscillating frequency and the pulse width, refer to Fig. 2-1).
■
Due to the inter-pulse ARC function, the ARC generated between the reverse-pulse outputs can be
erased.
■
The reverse-pulses of different systems can be synchronized. (*Pulse synchronization optical cable
(option) is required)
This product is effective for discharging electricity on different targets in the same chamber.
(Maximum 12 units can be synchronized).
■
Maximum six units can be connected in master-slave manner (hereinafter referred to as "M/S").
(*An M/S cable (option) is required).
(*M/S is available only for the same models).
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On the front panel, each parameter, such as the oscillating frequency, can be set.
■
Depending on the situation, each status, such as errors and pulse settings, appears on the front
display.
■
This product supports input from 380V to 400V.
Содержание DC-10-4P
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