Ulvac DC-10-4P, Руководство по эксплуатации

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DC Pulse Power Supply
【
DC-10-4P
】 3 PREPARATION
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Table 3-4: DC startup sequence in M/S / optical synchronization mode
Configuration Startup sequence
M/S From the downstream slave
System optical synchronization From System 1
3-4-8. Interlock at M/S
In case of M/S configuration, interlock pin (37-34pin) of slave unit's D-sub connector is unnecessary
because interlock signal is included in M/S cable. Perform interlock processing only on the master
machine.
If the M/S cable is disconnected or there is an abnormality in the M/S configuration, ERROR is
displayed on the master device and the slave device Interlock is released.
Figure 3-11. Interlock for M/S configuration
3-5.protection sheets
On the top plate, a protection sheet is covered for the contamination prevention. For this part, remove
the sheet.
? ? ? ? ?
Unpacking (with protection sheet)
Upon operation (without protection sheet)
Figure 3-12. Insulation and protection sheets
Protection sheet
Master
Slave1
Slave2
Process the interlock
pin (37-34pin) only
for the master.