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2
Troubleshooting
Investigating Vacuum Issues
Thermo Scientific
TSQ 9000 Hardware Manual
115
Turbomolecular pump shuts off while in use.
Table 23.
Possible Remedies when Turbomolecular Pump Shuts Off While in Use
Run Leak Check diagnostics to look for leaks and address them. Excessive gas flow may cause the pump to overheat.
Ensure the temperature of the lab environment is 15-35 °C.
Make sure the flow of carrier gas to the TSQ 9000 is less than 10 mL/min.
Содержание TSQ 9000
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