Description of Schematics 10-7
SRS Residual Gas Analyzer
In addition to the I/O port on the microcontroller, there are three 8-bit digital shift
registers which are loaded via the SPI, then strobed by a LD bit to transfer data to the
parts’ output registers. The three digital output ports are assigned as follows:
The LED port
Q0
Set high to light an LED to indicate that the +24V power supply is “okay”.
Q1
Set high to light an LED to indicate that the filament is “on”.
Q2
Set high to light an LED to indicate that the unit is degassing.
Q3
Set high to light an LED to indicate that the CDEM high voltage is “on”.
Q4
Strobe high to set I/V converter to LOG mode
Q5
Set high to light an LED to indicate that there has been an error.
Q6
Set high to light an LED to indicate that the pressure is too high.
Q7
Set high to light an LED to indicate that the filament is burnt-out.
The MPX port
Q0
CAL_0
LSB of current detector calibration attenuator multiplexer.
Q1
CAL_1
Middle bit of current detector calibration attenuator multiplexer.
Q2
CAL_2
MSB of current detector calibration attenuator multiplexer.
Q3
MPX_0
LSB of 16-bit A/D converter's input multiplexer.
Q4
MPX_1
Middle bit of 16-bit A/D converter's input multiplexer.
Q5
MPX_2
MSB of 16-bit A/D converter's input multiplexer.
Q6
EMIT_CTL
Filament heater duty cycle control: 0=direct, 1=regulate
Q7
GRID_SEL
Low for low grid potential, high for high grid potential.
The MISC port
Q0
RF_ON
Low to turn-off RF, high to turn on.
Q1
IONS_OFF
Pulse high for 50 ms to reset relay and ground FC
Q2
IONS_ON
Pulse high to set latching relay so FC signal enters I/V.
Q3
MULT_OFF
Pulse high to ground e-multiplier anode.
Q4
MULT_ON
Pulse high to connect e-multiplier to I/V.
Q5
LINEAR
Pulse high for linear I/V converter (offset calibration).
Q6
R/-C
Set high to read 16-bit A/D, low to initiate conversion.
Q6
CS_VETO
Set high to prevent (or release) -CS to 16-bit A/D converter.
Clocks
The master clock of the system is an 11.0592 MHz crystal oscillator. This frequency was
selected for the following reasons:
1. It is close to the maximum operating frequency for the 68HC11 (12 MHz).
2. When divided by four it provides a usable RF frequency (2.7648 MHz).
3. When divided by 128 it provides a clock for switching power supplies (86.4 kHz).
4. When divided by 256 it provides a clock for the high voltage DC-DC converter.
5. When divided by 384 it provides an exact PC baud rate (28.8 kbaud).
6. When divided by 2
14
it provides a A/D convert rate (675 Hz).
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...