5-1
SRS Residual Gas Analyzer
Chapter 5
RGA Windows Software
For detailed information and command description of the RGA program please refer to the RGA
On-Line Help files provided with the program disks. The RGA help system includes current and
detailed description of all the features, procedures, and commands available in the program.
In This Chapter
Overview..................................................................................................................................................5-3
Program Structure.......................................................................................................................5-3
RGA Files .....................................................................................................................................5-3
RGA files (.rga).........................................................................................................................5-3
RGA Scan log files (.ana .hst .tbl) ............................................................................................5-3
RGA ASCII Data files (.txt)......................................................................................................5-4
RGA Graph Metafiles (.wmf) ...................................................................................................5-4
System Requirements.................................................................................................................5-4
Getting Started........................................................................................................................................5-5
Starting the RGA Software .........................................................................................................5-5
Connecting to a Head .................................................................................................................5-5
Shutting Down the RGA System................................................................................................5-5
Features and Operation .........................................................................................................................5-7
The RGA Window ........................................................................................................................5-7
Multiple Head Operation .............................................................................................................5-7
Display Modes .............................................................................................................................5-7
Analog (Mode Menu)................................................................................................................5-7
Histogram (Mode Menu) ..........................................................................................................5-8
Table (Mode Menu) ..................................................................................................................5-8
P vs T (Mode Menu) .................................................................................................................5-9
Leak Test (Mode Menu) .........................................................................................................5-10
Annunciator (Mode Menu) .....................................................................................................5-10
Library (Mode Menu) .............................................................................................................5-11
Data Acquisition ........................................................................................................................5-11
Scan Data Logging....................................................................................................................5-11
Graph Management...................................................................................................................5-12
Head Management.....................................................................................................................5-12
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...