5-2
RGA Windows Software
SRS Residual Gas Analyzer
Sensitivity Factors .................................................................................................................... 5-13
Spectrum Analysis.................................................................................................................... 5-13
Background Data ...................................................................................................................... 5-13
RGA Head and Scan Parameters........................................................................................................ 5-14
Changing Scanning Parameters ............................................................................................. 5-14
Changing Head Parameters ..................................................................................................... 5-14
Changing Scan Trigger Rates ................................................................................................. 5-15
Display Modes ...................................................................................................................................... 5-16
Changing Display Modes ......................................................................................................... 5-16
Running in Split Display Mode ................................................................................................ 5-16
Manual Scaling of Graphs........................................................................................................ 5-16
Using Scan Data as Background ............................................................................................ 5-17
General Utilities.................................................................................................................................... 5-18
Using the Data Cursors ............................................................................................................ 5-18
Cursor command..................................................................................................................... 5-18
Cursor Properties command ................................................................................................... 5-18
Scheduled Saving of Data........................................................................................................ 5-18
Logging Scans ........................................................................................................................ 5-18
Viewing Scans ........................................................................................................................ 5-18
Browsing Through the Gas Library ........................................................................................ 5-19
Analyzing the Mass Spectrum ................................................................................................. 5-20
Spectrum Analysis description ............................................................................................... 5-20
Analysis Procedure................................................................................................................. 5-20
Averaging scan spectrum ........................................................................................................ 5-20
Pressure Reduction ................................................................................................................ 5-21
Y-axis unit change .................................................................................................................... 5-21
Head Calibration and Security.............................................................................................................. 5-22
Tuning the RGA Sensitivity...................................................................................................... 5-22
Adjusting the CEM Gain ........................................................................................................... 5-22
Peak Tuning the RGA Head ..................................................................................................... 5-23
Securing the RGA Head ........................................................................................................... 5-24
RGA On-line Help ................................................................................................................................. 5-25
Context Sensitive Help ............................................................................................................. 5-25
Help Search ............................................................................................................................... 5-25
Help Index.................................................................................................................................. 5-25
Commonly Asked Questions ................................................................................................... 5-25
Sample Scans............................................................................................................................ 5-25
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...