Stanford Research Systems RGA100, Operating Manual And Programming Reference

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Vacuum References
SRS-Vacuum Technology References
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14. Gary Ash, ““Cryogenic High Vacuum Pumps: An overview of their application and
use””, Vacuum&ThinFilm, August 1999, p. 20.
15. Phil Danielson, ““Cryopump Crossover””, Vacuum&ThinFilm, November 1999, p. 8
16. Vic Comello, ““Tailoring Traps to Specific applications””, R&D Magazine, January
2000, p. 59
17. I. Akutsu and T. Ohmi, ““Innovation of thr fore pump and roughing pump for high-
gas-flow semiconductor processing””, J. Vac. Sci. Technol. A 17(6) (1999) 3505.
18. ““Finding a pump just got easier””, R&D Magazine, Feb. 2000. Note: table describing
and comparing the pumps from 40 different suppliers.
19. Youfan Gu, ““Managing TEOS Effluents””, R&D Magazine, Feb. 2000, p. 67.
20. John Freeman, ““Cost Down and performance up!””, Inside Vacuum, Pfeiffer’’s
Customer Magazine, no. 5. Winter 2000. p. 9. A short article describing Balzer’’s
Split Flow Turbo Pumps. (Pfeiffer Vacuum is located in Nashua , NH)
21. Vic. Comello, ““Turbos Designed for Harsh Environments””, R&D Magazine, March
2000, p. 45.
22. Phillip A. Lessard, ““Vacuum Pumping Systems for Chemical Vapor Deposition
Tools””, Vacuum Technology & Coating, June 2000, p. 34.
23. J. J. Manura, ““Vacuum Pump Exhaust Filters. Part I: A Two Stage Vacuum Pump
Exhaust Filter System””, The Mass Spec Source , Summer 2000, p. 4. Note: A
newslatter published by Scientific Instrument Services, Inc. Ringoes, NJ.
www.sisweb.com .
24. Peter M. Yau and Atul N. Patil, ““Chemical Scroll Pumps Are Ideal for Lab
Applications””, R&D Magazine, June 2000, p. 80
25. Vic Comello, ““Roots Pumps are Versatile Performers””, R&D Magazine, Back to
Basics, June 2000, p. 93.
26. Vic Comello, ““High Speed Screw Pumps Being Developed for 300-mm Wafers””,
R&D Magazine, May 2000, p. 73.
27. Philip Lessard, ““Dry Vacuum pumps for semiconductor processes: Guidelines for
primary pump selection”” , JVST A 18(4) (2000) 1777.
28. R. P. Davis et. al. ““Dry Vacuum pumps: A method for the evaluation of the degree of
dry””, JVST A 18(4) (2000) 1782.
29. Atul Patil, ““Improving High Vacuum Pumping Performance Using a Cryogenic
Water Pump Backed by a Turbomolecular Pump””, July 2000, Vacuum Technology &
Coating, p. 40.