Vacuum References
SRS-Vacuum Technology References
13
34. M. McKeown, “What you should know about traps, valves and gauges”,
Semiconductor International, March 1991, p. 109.
35. M. Lenzen and R.E. Collins, “Hermetic indium metal-to-glass tube seal”, J. Vac. Sci.
Technol A18(2) (2000) 552.
36. Adam M. Hawkridge et. al. “Cryogenic ultrahigh vacuum manipulator for angle
dependent x-ray photelectron spectroscopy studies”, J. Vac. Sci. Technol. A 18(2)
(2000)567.
37. William Wuertz, “Welding system Improves Quality Assurance”, R&D Magazine,
March 2000, p. 26. Note: Orbital TIG Welders let you weld tubes all by yourself!
38. Rich Combs, “New RF Feedthrus Minimize Coupling Effects”, R&D Magazine,
March 2000, p. 47.
39. Kimo M. Welch, “Finger Ponting in the FAB”, Vacuum Technology and Coating,
May 2000, p. 12-16.
40. Gerald Murphy and Kathryn Whitenack, “Chilled Water Options Vary for
Laboratory Equipment”, R&D Magazine, May 2000, p. 55.
41. Vic Comello, “Viewport Shutter Designs Meet Deposition Requirements”, R&D
Mag. June 2000, p. 87.
42. C. Biscardi, et. al. “Application of Porcelain Enamel as an UHV-compatible
electrical insulator”, JVST A 18(4) (2000) 1751.
43. Vincenc Nemanic et. al. “Experiments with a thin walled stainless steel vacuum
chamber”, JVST A 18(4) (2000) 1789.
44. Phil Danielson, “Improve your vacuum system performance and behavior”, R&D
Magazine, August 2000, p.39.
45. Kaveh H. Zarkar, et. al. “Designing High-Performance Vacuum Control Systems”,
R&D Magazine, Sept 2000, S-3.
46. Phil Danielson, “Assessing Gas Loads in Vacuum System Design”, R&D Magazine,
Oct. 2000, p. 39
47. Dan Goodman et. al., “Etch and CVD process improvements via heated vacuum
throttle valves”, Solid State Technology, December 2000, p. 80.
48. Boude C. Moore, “Thin-walled chambers of austenitic steel”, J. Vac. Sci. Technol. A
19(1) (2001) 228.
49. Z. Celinski , “Molecular Beam epitaxy system at an undergraduate institution”, J.
Vac. Sci. Technol. A 19(1) (2001) 383.
50. D. L. Miller et. al. , “All metal ultrahigh vacuum optical fiber feedthru”, J. Vac. Sci.
Technol. A 19(1) (2001) 386.
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...