Stanford Research Systems RGA100, Operating Manual And Programming Reference

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26 Vacuum References
SRS-Vacuum Technology References
43. Hiroshi Saeki, ““Vacuum Gauge system with a self-compensator for photoelectrons
produced in the Spring-8 storage ring””, J. Vac. Sci. Technol. A 19(1) (2001) 349
44. P. H. LaMarche, et. al.,””Neutral Pressure and gas flow instrumentation for TFTR””,
Rev. Sci. Instrum. 56(5) (1985) 981. Note: there is an excellent description of an Ion
Gauge setup allowing Bayard-Alpert Gauge measurements in the presence of
magnetic fields.
45. Ronald C. Johnson, Randy Tysinger and Paul Arnold, ““Pressure Measurement
repeatability in high current ion implanters using hot cathode ionization gauge with
design and operation optimized for stability””, J. Vac. Sci. Technol. A 22(5)(2004)
2191.
Pirani/Thermocouple Gauges
1. Phil Danielson, ““The Ins and Outs of Thermal Conductivity Pressure Gauges””, R&D
Magazine, Oct. 2004, p. 36. Note: Start from here. This article tells you all the basic
and important stuff you need to know. Move on to dig deeper.
2. J. English et. al. J. Sci. Instrum. 42 (1965) 77, ““A wide Range constant resistance
Pirani Gauge with ambient temperature compensation””.
3. Heijne,L. et. al. , Philips Technical Review, 30(1969) 166, ““A Pirani Gauge for
pressures up to 1000 Torr and higher””.
4. K. F. Poulter et. al. , J. Vac. Sci. and Technol. 17(2) (1980) 638, ““Reproducibility of
the performance of Pirani Gauges””.
5. Vic Comello, ““When to Choose a Thermocouple Gauge””, R&D Magazine, May
2000, p. 75.
6. T. M. Berlicki, ““Heat Dissipation in thin-film vacuum sensor””, J. Vac. Sci. Technol.
A 19(1) (2001) 325.
7. E. Zakar et. al. , ““Process and fabrication of lead zirconate titanate thin film pressure
sensor””, J. Vac. Sci. Technol. A 19(1) (2001) 345.
8. S. N. Wang, ““Thermal Micropressure sensor for pressure monitoring in a minute
package””, J. Vac. Sci. Technol. A 19(1) (2001) 353
9. Suman Chatterjee, et. al. , ““A Vacuum gauge using positive temperature coefficient
thermistor as the sensor””, Rev. Sci. Instr., 71(2000) 4670.
Pressure Calibration/Spinning Rotor Gauge
1. W. Steckelmacher, Vacuum 37 (1987) 651, ““The Calibration of Vacuum Gauges””.