10-1
SRS Residual Gas Analyzer
Chapter 10
RGA Circuit Description
This chapter describes the electronics circuits located inside the Electronics Control Unit of
the RGA.
There are no electronics components inside the RGA Probe.
The information in this chapter is provided for the use by qualified technical personnel
during service and repairs.
Warnings
x
The ECU is to be serviced by qualified technical personnel only. There are no
user serviceable parts inside.
x
Dangerous voltages, capable of causing injury or death, are present in this
instrument. Use extreme caution whenever the ECU covers are removed. Do not
remove the covers while the unit is plugged in.
x
Always disconnect the power before removing the covers of the ECU.
In This Chapter
Overview of the RGA ............................................................................................................................ 10-3
Circuit Description................................................................................................................................ 10-4
General Description.................................................................................................................. 10-4
Circuit Boards ........................................................................................................................... 10-5
Description of Schematics................................................................................................................... 10-6
Schematic name: QMSE_T1 .................................................................................................... 10-6
Microprocessor ....................................................................................................................... 10-6
Digital I/O Ports...................................................................................................................... 10-6
The LED port.......................................................................................................................... 10-7
The MPX port ......................................................................................................................... 10-7
The MISC port........................................................................................................................ 10-7
Clocks ..................................................................................................................................... 10-7
RS232 Interface ...................................................................................................................... 10-8
Schematic name: QMSE_T2 .................................................................................................... 10-8
I/V calibration......................................................................................................................... 10-8
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...