1-6
Installation
SRS Residual Gas Analyzer
x
Enough clearance must be allowed for the ECU box that attaches directly to the
probe’s feedthru flange.
x
Choose the orientation of the ECU box prior to the installation of the probe. Six
different orientations can be obtained rotating the probe about its axis and lining
up the bolt holes of the 2 3/4” Conflat flanges.
Note
: The ECU will operate in any orientation, but limited space, free access to
the rear panel connectors and visual access to the LED’s might limit the
orientation options in your vacuum system.
5. The following equipment must be available before the installation procedure starts:
x
One standard OFHC copper gasket for 2 3/4” CF flange. New and clean!
x
Six high-strength stainless steel bolts for 2 3/4” CF flanges: Use six 1/4-28 x 1
3/8” bolts, with one nut and two washers per screw, for flanges with through
holes; or six 1/4-28 x 7/8” bolts, with one washer per screw, to attach the probe’s
flange to a tapped vacuum port. Both standard hex and 12-point bolt heads are
compatible with the RGA’s flange.
Use silver-plated bolts instead of messy anti-seize lubricants whenever available.
x
Wrenches: One or two wrenches will be needed to tighten the six bolts and
compress the copper gasket. Use a 7/16” 12-point wrench for standard hex head
bolts and nuts, or a 1/4” 12-point wrench for 12-point bolt heads.
x
Optional adapter flanges: Install an adapter flange in the vacuum system if no 2
3/4” CF ports are available. Zero-Length Adapter flanges, with a 2 3/4” CF
flange on one side and a bigger size flange on the other, are an economical
alternative to reducing nipples.
Procedure
1. Determine the placement of the probe in the vacuum chamber following the
instructions listed in step 3 of the Hardware Requirements section.
2. Remove the probe from its plastic container.
Avoid contamination following good high vacuum practices. Do not touch with bare
fingers any part of the probe that will be exposed to the vacuum. Do not talk directly
at an open vacuum port.
3. Hold the probe in a secured upright position and do a thorough visual inspection of
the part. Check for loose, damaged or misaligned components. Minor misalignments
of the ionizer’s outer cage (i.e. repeller) can occur during shipping and must be
corrected before the ionizer is inserted into the vacuum chamber. Check the integrity
of the metal seals in all CF flanges.
Important
: Abort the installation procedure and contact SRS immediately if the
probe appears damaged in any way.
4. Position the copper gasket and insert the probe’s ionizer into the vacuum system.
Rotate the probe about its axis and align the holes on the CF flanges, as necessary to
achieve the desired orientation for the ECU box. Avoid scratching the vacuum seals
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...