Appendix C
SRS Residual Gas Analyzer
17
PPM100 Specifications
Specifications apply after 1 hour of warm-up
General
Interfaces
RS-232 (std.), USB (std), GPIB (std) or Ethernet interface with
embedded web server.
Power
90 to 264 VAC, 47 to 63 Hz, 240 W
Operating temperature
0°C to 40°C, non-condensing
Less than 90% humidity
Weight/Dimensions
15 lbs. / 8.5"x5.25"x16" (WHD)
Warranty
One year parts and labor
Display
Type
Back-lit, touchscreen LCD (4.7" diag)
Resolution
320 x 240 pixels
Modes
Numeric, bargraph, P vs. T
Units
Torr, mbar, bar, Pa and micron
Numeric resolution
3 digit mantissa plus exponent
Update rate
2 samples per second
Electrical (20°C to 30°C)
Analog I/O
Ports
4 configurable analog ports
Range
±12 Vdc
Resolution
14-bit (In), 12-bit (Out)
Update rate
2 Hz
Connector
BNC
Gauges (Total Pressure)
Capacitance Manometer
Number of gauges
Simultaneous readout of up to four capacitance manometers
using the auxiliary inputs.
Auxiliary power output
±15 Vdc, 100 mA (for CM power)
Process Control
Number of channels
8 channels with programmable setpoint, polarity, hysteresis,
delay, audio signal and text messages.
Input signals
Total pressure (CM gauge), partial pressure (RGA), voltage
(I/O ports), time (internal clock), TTL and gauge status.
Output signals
Relay and TTL level
Relays
SPDT, form C, 5A/250VAC/30VDC, resistive load
TTL outputs
Active low, opto-isolated
Manual control
All channels can be operated from front panel.
Remote TTL control
7 opto-isolated TTL channels (Fil on/off, Degas on/off, Fil
lockout, Control keypad lockout, data logging time reset,
touchscreen enable/disable, remote enable/disable)
Summary of Contents for RGA100
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