10-6 Description of Schematics
SRS Residual Gas Analyzer
Description of Schematics
Schematic name: QMSE_T1
Microprocessor
An MC68HC11E9 microcontroller is used to control the system and to communicate with
the host computer. This central processing unit (CPU) also has RAM, ROM, EEPROM,
UART, octal 8-bit A/D converter, counter timers, and a multiplexed address/data bus to
accommodate an external 32Kx8 RAM. The ROM is used for program storage, the RAM
for data storage, the EEPROM contains calibration values for the particular unit.
The power-up reset and power-fail interrupts are provided to the CPU by U100, a
MAX705.
Digital I/O Ports
The microprocessor’s I/O ports are assigned as follows:
PA0
-RTS
Low indicates that the host computer is ready for RS232 data.
PA1
-BUSY
Low indicates that the 16-bit signal A/D converter is busy.
PA2
CAL_EN
High enables modification of EEPROM calibration data.
PA3
LE_DAC18
Set high to latch SPI data into 18-bit (RF control) D/A converter.
PA4
-CS_DAC8
Strobe low to assert CS to octal 8-bit DAC.
PA5
LD_LEDS
Strobe high to load LED data into output register.
PA6
LD_MPX
Strobe high to load multiplexer data into output register.
PA7
LD_MISC
Strobe high to load miscellaneous data into output register.
PB
0-7
A8-15
High address bits for external RAM
PC
0-7
A0-7 & D0-7
Multiplexed address and data bits for external RAM
PD0
RXD
RS232 data received from host computer.
PD1
TXD
RS232 data transmitted to host computer.
PD2
SPI_IN
Serial peripheral interface data from 16-bit A/D converter.
PD3
SPI_OUT
Serial peripheral interface data to 8 and 18-bit D/A converters.
PD4
SPI_CLK
Serial peripheral interface data clock.
PD5
-CTS
Low to allow host computer to send RS232 data.
PE0
+24/6
A/D input: +24VDC supply divided by 6.
PE1
RF_CT/5
A/D input: RF primary voltage divided by 5.
PE2
RF_PRI
A/D input: RF primary current: 1V/400mA
PE3
GND
A/D input: 0 VDC
PE4
GND
A/D input: 0 VDC
PE5
FOCUS_I
A/D input: focus plate ion current: 1V/5
P
A
PE6
FIL_DUTY
A/D input: filament heater duty cycle: 1V/20%
PE7
FIL_PRI
A/D input: filament heater primary current: 3V/A
Summary of Contents for RGA100
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Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...