1-4
Installation
SRS Residual Gas Analyzer
Installation
Introduction
The standard SRS RGA System consists of:
1. RGA Probe.
2. Electronics Control Unit (ECU.)
3. RGA Windows Software.
Specific hardware requirements and installation instructions are needed for each one of
the components
.
Important
x
Follow the installation steps in the strict order in which they are presented in this
chapter.
x
Do not power up the instrument until it is indicated in the procedure.
x
Read the hardware requirements before installation begins. Do not start the
installation procedure until all requirements are met.
x
Please read and follow all installation instructions to insure that the optimum
performance of the instrument is not compromised during the installation process.
Probe Installation
The RGA probe can be mounted on any standard 2 3/4" CF port of the vacuum chamber
that provides enough clearance for the ionizer’s outer cage.
A stainless steel tube (RGA Cover Nipple) covers the probe assembly with the exception
of the ionizer. The ionizer is the only component of the probe that protrudes into the
vacuum system (see Figure 1.)
Warnings
:
i
Do not remove the probe from its plastic shipping cover until it is ready to be
installed in the vacuum system.
i
Do not remove the RGA Cover Nipple from the probe. The stainless steel tube is an
integral part of the quadrupole assembly and the RGA will not operate properly
without it. Please consult the Hardware Modifications section in the RGA
Quadrupole Probe chapter of this manual for information on operating the RGA
probe without its factory provided cover nipple.
i
Do not disassemble or modify the quadrupole probe in any way without reading first
the Hardware Modifications section of the RGA Quadrupole Probe chapter.
i
Use proper vacuum procedures while installing the probe:
Set aside a clean, dust free, work area next to the vacuum port.
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...