Contents
SRS Residual Gas Analyzer
viii
Running in Split Display Mode ................................................................................................ 5-16
Manual Scaling of Graphs........................................................................................................ 5-16
Using Scan Data as Background............................................................................................. 5-17
General Utilities..................................................................................................................................... 5-18
Using the Data Cursors ............................................................................................................ 5-18
Cursor command..................................................................................................................... 5-18
Cursor Properties command ................................................................................................... 5-18
Scheduled Saving of Data........................................................................................................ 5-18
Logging Scans ........................................................................................................................ 5-18
Viewing Scans ........................................................................................................................ 5-18
Browsing Through the Gas Library ........................................................................................ 5-19
Analyzing the Mass Spectrum ................................................................................................. 5-20
Spectrum Analysis description ............................................................................................... 5-20
Analysis Procedure................................................................................................................. 5-20
Averaging Scan Spectrum ....................................................................................................... 5-20
Pressure Reduction .................................................................................................................. 5-21
Y-Axis Unit Change................................................................................................................... 5-21
Head Calibration and Security.............................................................................................................. 5-22
Tuning the RGA Sensitivity...................................................................................................... 5-22
Adjusting the CEM Gain ........................................................................................................... 5-22
Peak Tuning the RGA Head ..................................................................................................... 5-23
Securing the RGA Head ........................................................................................................... 5-24
RGA On-line Help .................................................................................................................................. 5-25
Context Sensitive Help ............................................................................................................. 5-25
Help Search ............................................................................................................................... 5-25
Help Index.................................................................................................................................. 5-25
Commonly Asked Questions ................................................................................................... 5-25
Sample Scans............................................................................................................................ 5-25
Chapter 6 Programming the RGA Head
6-1
Introduction ............................................................................................................................................. 6-4
The RGA COM Utility .............................................................................................................................. 6-4
Intoduction .................................................................................................................................. 6-4
Communicating with a Head...................................................................................................... 6-4
RS232 Interface ....................................................................................................................................... 6-6
LED Indicators......................................................................................................................................... 6-6
Command Syntax.................................................................................................................................... 6-7
Examples of command formats ................................................................................................ 6-7
Programming tips...................................................................................................................... 6-8
Summary of Contents for RGA100
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