2-4
The SRS RGA
SRS Residual Gas Analyzer
the program disks, for detailed information on the features, procedures, and commands
available in the RGA Windows program.
Intelligent firmware, built into the RGA Head, completely controls the operation of the
instrument, and provides four basic modes of operation of the mass spectrometer:
x
Analog scanning
x
Histogram scanning
x
Single mass measurement
x
Total pressure measurement
.
RGA Windows provides fast access to all the RGA functions without the need for any
computer programming; however, the instrument can also be programmed directly using
the RGA Command Set supported by its serial interface. Consult the RGA Programming
chapter of this manual for information on the programming options and a complete listing
of the RGA Command Set.
The SRS RGA is available in three different models with mass ranges of 1 to 100
(RGA100), 1 to 200 amu (RGA 200), and 1 to 300 amu (RGA300). All models operate in
the “Constant Resolution” or “Constant
'
m” mode, with
'
M
10%
preset to one amu at the
factory.
The operating pressure is UHV to 10
-4
Torr for all models.
A complete product specifications listing is included in the introductory sections of this
manual.
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...