6
Appendix C
SRS Residual Gas Analyzer
Figure 4
. Leak trend Display Mode. Use this graphical mode to Leak test components of
your vacuum system. PP2 data bar is set to Leak trend, and three display modes are
available on the same screen to visualize leak rates during testing.
Mass Spec Display
A Scan Display mode is available to graph RGA Mass Spectra directly on the front panel of the
controller. During analog scanning the quadrupole mass spectrometer is stepped at fixed mass increments
(i.e. 0.1 amu) through a user-specified mass range. The ion current is measured after each mass-increment
step and transmitted to the PPM100 for display. Analog scanning simplifies the detection of mass peaks
for component gas identification, and provides a direct measure of the mass resolution of the quadrupole
mass spectrometer.
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...