Stanford Research Systems RGA100, Operating Manual And Programming Reference

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xiv Specifications
SRS Residual Gas Analyzer
Specifications
Operational
Mass Range:
RGA100 1 to 100 amu
RGA200 1 to 200 amu
RGA300 1 to 300 amu
Mass filter type Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”)
Detector type Faraday cup (FC) - standard
Electron multiplier (CDEM) - optional
Resolution
(per AVS standard 2.3).
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass
range.
Sensitivity (A/Torr)* 2
.
10
-4
(FC)
<200 (CDEM). User adjustable throughout high voltage range.
Minimum detectable
partial pressure
(MDPP)* 5
.
10
-11
Torr (FC).
5
.
10
-14
Torr (CDEM).
Operating pressure
range 10
-4
Torr to UHV (FC)
10
-6
Torr to UHV (CDEM)
Max. bakeout
temperature (without
ECU)
300
°
C
Operating Temperature 70
°
C (max.)
Recommended bakeout
temperature 200°C (O100HJR Heater Jacket recommended)
Total press.
measurement Available with FC measurements only
* Measured with N
2
@ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV
ion energy and 1 mA electron emission current.
Ionizer
Design Open ion source, cylindrical symmetry.
Operation Electron impact ionization.
Material Stainless steel, type 304.