Appendix C
SRS Residual Gas Analyzer
9
Figure 8
. Data Logging (Chart) Display mode of the PPM100. Both Graph and Table
display modes are shown side-to-side. The signal-vs-time display allows you to monitor
pump-down and venting cycles and follow the time behavior of your system.
The logged data can be accessed through the touchscreen LCD. Both table and chart (P vs. Time) displays
are available. The chart display includes convenient graphical tools such as (1) cursor, (2) zoom, (3) (x,
y)-axis scaling (manual and auto), and (4) cursor readings. Users can switch rapidly between current and
logged readings for the pressures or analog signals of interest. The data log can also be accessed remotely
through the computer interface, or through the world wide web when using the embedded web server.
Typical applications of the Data Logging capabilities include capturing pump-down or venting curves for
vacuum system characterization, monitoring mass-flow controller signals during deposition processes,
and tracking temperatures and other time dependent variables during bakeouts or heat treatments.
Summary of Contents for RGA100
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Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
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