20
Vacuum References
SRS-Vacuum Technology References
30. Vic Comello, “Ion Pumps Provide Clean UHV Environments”, R&D Magazine, July
2000, p. 45
31. Steven Chambreau, et. al. , “Low cost, mechanically refrigerated diffusion pump
baffle for ultrahigh vacuum chambers”, J. Vac. Sci. Technol. A 18(5) (2000) 2581
32. Kimo Welch, “Closed-Loop Gaseous Helium Cryopumps”, Vacuum Technology and
Coating, Spetember 2000, p. 8
33. M. H. Hablanian, “The Hybrid High Vacuum Turbopump”, Vacuum Technology and
Coating, Sept 2000, p. 40.
34. Heinz Barfus, et.al. , “Moving Dry Pumps From the Subfab Floor To the Tool”, R&D
Magazine, September 2000, S18.
35. Kimo Welch, “The Cryopump Placebo Effect”, Vacuum Technology and Coating,
September 2000, p. 10.
36. “Alloys Update Getter Pumps”, R&D Magazine, November 2000.
37. Phil Danielson, “Diaphragm Pump Designs Determine Results”, R&D Magazine,
November 2000.
38. Phil Danielson, “How to Match Pumping Speed to Gas Load”, R&D Magazine,
December 2000, p. 30.
39. Phil Danielson, “Careful Consideration Means getting the right pump”, R&D
Magazine, April 2001, p. 29.
40. Donald Mattox, “Mechanical Vacuum Pumps”, Vacuum Technology &Coating,
April 2001, p. 53.
41. Dale Morton, “The effects of Pumping Speed on the Operation of a Cold Cathode Ion
Source”, Vacuum Technology and Coating, June 2001, p. 36.
42. Phil Danielson, “Making the Oil-Sealed vs. Oil Free Decision”, R&D Magazine, July
2001, p. 66.
43. A. Liepert and and P. Lessard, “Design and operation of scroll-type dry primary
vacuum pumps”, J. Vac. Sci. Technol. A19(4) (2001) 1708
44. Donald Mattox, “Oil Diffusion Pumps”, Vacuum Technology and Coating, July
2001. P.26
45. P.D. Vibert, “Troubleshooting Vacuum Pumping Systems”, Vacuum Technology and
Coating, July 2001, p. 55.
46. C. G. Masi, “Instrumentation Needs Drive Turbopump Development”, R&D
Magazine, Oct 2001, p. 16
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...