10-2
SRS Residual Gas Analyzer
A/D Conversion ......................................................................................................................10-8
Power-up Conditioning ...........................................................................................................10-9
Schematic name: QMSE_T3)....................................................................................................10-9
DC Control Voltages...............................................................................................................10-9
RF Amplitude Detection .........................................................................................................10-9
RF Amplitude Control...........................................................................................................10-10
Foldback Current Limiting....................................................................................................10-10
Schematic name: QMSE_B1. .................................................................................................10-11
Mass filter RF Supply ...........................................................................................................10-11
DC Potentials ........................................................................................................................10-12
Schematic name: QMSE_B2. .................................................................................................10-12
Filament Heater Supply.........................................................................................................10-12
Bias Regulators .....................................................................................................................10-13
Schematic name: QMSE_B3 ..................................................................................................10-14
Power Supplies......................................................................................................................10-14
Schematic name: QMSE_V1...................................................................................................10-14
Signal Conditioning ..............................................................................................................10-14
Schematic name: QMSE_V2...................................................................................................10-15
Electron Multiplier High Voltage Power Supply..................................................................10-15
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
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Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...