6-2
Programming the RGA Head
SRS Residual Gas Analyzer
RGA Command Set ...............................................................................................................................6-29
Initialization Commands...........................................................................................................6-30
ID?..........................................................................................................................................6-30
IN0, IN1, IN2 .........................................................................................................................6-30
Ionizer Control Commands ......................................................................................................6-32
DGparam, param: 0 - 20,*.....................................................................................................6-32
EEparam, param: 25 - 105, *, ?.............................................................................................6-33
FLparam, param: 0.00 - 3.50, *, ? .........................................................................................6-34
IEparam, param: 0,1, *, ? ......................................................................................................6-36
VFparam, param: 0 - 150, *, ?...............................................................................................6-36
Detection Control Commands .................................................................................................6-38
CA ..........................................................................................................................................6-38
CL...........................................................................................................................................6-39
HVparam, param: 0 - 2490, *, ?............................................................................................6-40
MO? .......................................................................................................................................6-42
NFparam, param: 0 - 7, *, ?...................................................................................................6-42
Scan and Measurement Commands .......................................................................................6-44
AP?.........................................................................................................................................6-44
HP?.........................................................................................................................................6-44
HSparam, param:0 - 255,* ....................................................................................................6-45
MFparam, param: 1 - M_MAX, *, ? .....................................................................................6-47
MIparam, param: 1 - M_MAX, *, ? ......................................................................................6-47
MRparam, param:0 - M_MAX .............................................................................................6-48
SAparam, param: 10 - 25, *, ?...............................................................................................6-50
SC[param], param: 0 - 255, * ................................................................................................6-51
TP?, TP0, TP1 ........................................................................................................................6-52
Parameter Storage Commands................................................................................................6-55
MGparam, param: 0.0000 - 2000.0000,? ..............................................................................6-55
MVparam, param: 0 - 2490,? ................................................................................................6-55
SPparam, param:0.0000 - 10.0000, ? ....................................................................................6-56
STparam, param:0.0000 - 100.0000, ? ..................................................................................6-56
Mass Filter Control Commands ...............................................................................................6-58
MLparam, param: 0.0000 - M_MAX....................................................................................6-58
Error Reporting Commands.....................................................................................................6-59
EC?.........................................................................................................................................6-59
ED?.........................................................................................................................................6-59
EF? .........................................................................................................................................6-60
EM?........................................................................................................................................6-60
EP? .........................................................................................................................................6-61
EQ?.........................................................................................................................................6-61
ER?.........................................................................................................................................6-62
Tuning Commands....................................................................................................................6-63
CE?.........................................................................................................................................6-63
DIparam, param: 0 - 255, *, ? ...............................................................................................6-63
DSparam, param: -0.8500 - +0.8500, *, ? .............................................................................6-64
RIparam, param: -86.0000 - +86.0000, *, ?, none ................................................................6-65
RSparam, param: 600.0000 - 1600.0000, *, ?, none .............................................................6-67
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...