9-6
Basic Troubleshooting
SRS Residual Gas Analyzer
Error Code:
DET6
Type of Error:
Electrometer
Error Message:
Electrometer Error: DETECT fails to read +5nA input current.
Error Cause:
The logarithmic output of the picoammeter is not within the levels expected for a
+5 nA input current.
Troubleshooting:
Contact SRS.
Error Code:
DET7
Type of Error:
Electrometer
Error Message:
Electrometer Error: ADC16 Test Failure.
Error Cause:
The 16 bit analog-to-digital converter used to digitize the logarithmic output of
the picoammeter reports an output greater than 15 mV when its input is grounded.
Troubleshooting:
Contact SRS.
Error Code:
EM7
Type of Error:
Electron Multiplier
Error Message:
Electron Multiplier Error: No Electron Multiplier Option available in this head.
Error Cause:
A function involving the electron multiplier was invoked in a unit that does not
include the CDEM option (Option 01.)
Troubleshooting:
Do not use any of the CDEM related commands in this unit.
Upgrade the RGA to an Electron Multiplier option (Option 01).
Error Code:
FL6
Type of Error:
Filament “Background Protection Mode”.
Error Message:
Filament Error: Unable to set the requested emission current.
Error Cause:
The filament heater was unable to establish the requested emission current. The
most common reason for this problem is a serious leak in the vacuum system. In
the event of an overpressure detection, the filament emission and the electron
multiplier are immediately turned off, and the Error and Leak LED’s are turned
on to indicate the problem.
Important: The Leak LED will also be turned on if the Thoria coating of the
filament is excessively worn down or damaged. However, this is a more rare
event due to the long life of the thoriated iridium filaments.
Troubleshooting:
The following troubleshooting steps are recommended:
Note: Retry turning on the filament after each step.
The RGA Head must be installed in a vacuum system and pumped down to
pressures under 10
-4
Torr for the instrument to operate correctly.
Check the pressure in the vacuum system.
Check for leaks, open valves or large sources of contamination that might be
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
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Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
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Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...