Stanford Research Systems RGA100, Operating Manual And Programming Reference

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Vacuum References
SRS-Vacuum Technology References
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17. Greg A. Pfister, ““Eliminating Seal Contamination in Semiconductor Process
Equipment””, Vacuum Technology &Coating, June 2000, p. 29.
18. L. Layden and D. Wadlow, ““High Velocity carbon dioxide snow for cleaning
vacuum system surfaces””, J. Vac. Sci. Technol. A 8(5) (1990) 3881.
19. Phil Danielson, ““Reduce Water Vapor in Vacuum Systems””, R&D Magazine,
September 2000, S-10.
20. Rita Mohanty, ““Use of Getters in Hermetic Packages””, Vacuum Technology and
Coating, October 2000, p. 41.
21. Andrew D. Johnson, et.al., ““Reducing PFC gas emissions from CVD chamber
cleaning””, Solid State Technology, December 2000, p. 103.
22. Mark Higgins, ““High Sensitivity Leak Detection, Done Simply””, Vacuum
Technology &Coating, January 2001, p. 42.
23. Donald Mattox, ““Water and Water Vapor””, Vacuum Technology and Coating, Jan
2001, p. 58.
24. Phil Danielson, ““Desorbing Water in Vacuum Systems: Bakeout or UV?””, R&D
Magazine, January 2001, p. 57.
25. Dave Laube, ““Limitations of CO2 cleaning for Semiconductor Process Tools””, A2C2
Magazine, February 2001, p. 9. (for general info on this article email:
info@a2c2.com )
26. Phil Danielson, ““Contamination Lurks in Vacuum Systems, Sources””, R&D
Magazine, May 2001, p. 45.
27. Phil Danielson, ““Fight Humidity in your vacuum system””, R&D Magazine, June
2001, p. 67.
28. Bob Langley and Paul LaMarche, ““Cleaning of Parts For Use In Vacuum””, Vacuum
Technology and Coating, August 2001, p.6.
29. Phil Danielson, ““Using Simple Tools to Avoid Vacuum Performance Problems””,
R&D Magazine, Dec 2001, p. 61. Note: This is an excellent explanation of how rate-
of-rise and pumpdown curves can be used to characterize vacuum systems. IGC100
controllers offer front panel display of such curves, making system characterization
very simple.
30. Donald M. Mattox, ““Deposition Chambers and Vacuum-surface ““Conditioning””””,
Vac. Techn. & Coating, Sept. 2002, p. 30.
31. P. A. Redhead, ““Recommended practices for measuring and reporting outgassing
data””, J. Vac. Sci. Technol. A 29(5)(2002)1667. Note: This is another Redhead
classic, this time recommending a set of uniform procedures for reporting outgassing
data.