Stanford Research Systems RGA100, Operating Manual And Programming Reference

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Vacuum References
SRS-Vacuum Technology References
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18. Emil Drubetsky and Richard Glazewski, ““Vacuum Measuremeents using Modern
Cold Cathode Technology””, Vacuum Technology and Coating, Oct 2002, p. 54.
19. Donald Mattox, ““Vacuum Gauging””, Vacuum Technology & Coating, February
2003, p. 26.
20. Donald Mattox, ““Vacuum Gauges for the Plasma Environment””, Vacuum
Technology and Coating, June 2003, p. 26 . Note: Capacitance Manometers and
Spinning Rotor Gauges are discussed as preferred gauges for PVD applications
where plasmas can interfere with ionization sources.
21. Hiroshi Saeki, et. al. ““Pressure Measurement errors in cold cathode ionization gauge
caused by an external electron source””, J. Vac. Sci. Technol. A22(5) (2004) 2212.
Bayard-Alpert Ionization Gauges
1. D. Alpert, Journal of Applied Physics 24 (1953) 860, ““New Developments in the
production and measurement of UHV””. Note : This is the report on the invention of
the B-A Gauge
2. J. H. Singleton, ““Practical guide to the use of Bayard-Alpert Ionization Gauges””, J.
Vac. Sci. Technol. A19(4) (2001)1712.
3. Gerardo Brucker, ““Which Bayard-Alpert Gauge is best for you?””, R&D Magazine,
Feb. 2000, p. 69.
4. Peter Nash, ““The use of hot filament ionization gauges””, Vacuum 37 (1987) 643
5. P. E. Gear, ““The choice of cathode material in a hot cathode ionization gauge””,
Vacuum 26(1) (1975) 3
6. George Comsa, ““Ion Collection in Bayard-Alpert Gauges””, J. Vac. Sci. Technol. 9
(1971) 117. Note: Great paper on how it all works inside the gauge.
7. P. A. Redhead, JVST 6 (1969) 848, ““The sensitivity of Bayard-Alpert Gauges””.
8. Tilford, Charles, JVST A3(3) (1985) 546, ““Sensitivity of hot cathode ionization
gauges””. Note : Very useful information on gauge-to-gauge reproducibility of
commercial B-A gauge sensitivities.
9. T.A. Flaim and P.D. Ownby, J. Vac. Sci. Technol. 8(5) (1971) p 661, ““Observations
on B-A Ion Gauge Sensitivities To Various Gases””
10. Albert Filippelli et. al., ““Search for pressure dependence in the sensitivity of several
common types of hot-cathode ionization gauges for total pressures down to 10
-7
Pa””,
J. Vac. Sci. Technol. A9(5) (1991) 2757
11. Abbott, P.J. et. al. JVST A12(5) (1994) 2911, ““Influence of the filament potential
wave form on the sensitivity of glass envelope B-A gauges””.