8-10 Ionizer Replacement
SRS Residual Gas Analyzer
16. Attach the new repeller to the longer filament rod using a fresh screw. Align the cage
and tighten the screw (Correct alignment is best assured when the two small holes on
the side of the repeller cage line up with the filament screws.)
17. Inspect visually the entire ionizer assembly to assure the correct alignment of its
parts, and, if satisfied, mount the probe back on the vacuum system. Check the
correct rotational orientation of the feedtrhu flange (i.e. same as it was before
disassembly) before tightening the flange bolts.
18. A bakeout of the probe is highly recommended before operating the RGA again.
19. Retune the sensitivity of the RGA, following the instructions in the RGA Tuning
chapter, before using the unit for quantitative measurements.
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...