SRS Residual Gas Analyzer
ii
Certification
Stanford Research Systems certifies that this product met its published specifications at the time
of shipment.
Warranty
This Stanford Research Systems product is warranted against defects in materials and
workmanship for a period of one (1) year from the date of shipment.
Service
For warranty service or repair, this product must be returned to a Stanford Research Systems
authorized service facility. Contact Stanford Research Systems or an authorized representative
before returning this product for repair. All users returning an RGA Probe back to the factory for
repair and/or service must submit a correctly completed “Declaration of Contamination of
Vacuum Equipment” form along with the instrument. The SRS personnel carrying out the repair
and service of vacuum equipment must be informed of the condition of the components before
any work is done on the parts. A copy of the form is attached to the end of this manual.
Information in this document is subject to change without notice.
Copyright © Stanford Research Systems, Inc., 1996. All rights reserved.
Stanford Research Systems, Inc.
1290-D Reamwood Avenue
Sunnyvale, California 94089
Summary of Contents for RGA100
Page 4: ...SRS Residual Gas Analyzer iv...
Page 18: ...xviii Command List SRS Residual Gas Analyzer...
Page 46: ...2 14 Residual Gas Analysis Basics SRS Residual Gas Analyzer...
Page 66: ......
Page 78: ...4 12 Mass Filter Power supply SRS Residual Gas Analyzer...
Page 104: ......
Page 107: ...Programming the RGA Head 6 3 SRS Residual Gas Analyzer Error Byte Definitions 6 69...
Page 216: ...8 26 Quadrupole filter cleaning SRS Residual Gas Analyzer...
Page 246: ...11 2 SRS Residual Gas Analyzer...
Page 247: ......
Page 248: ......
Page 268: ...Appendix B SRS Residual Gas Analyzer 7...
Page 312: ...Appendix D SRS Residual Gas Analyzer 27...