Stanford Research Systems RGA100, Operating Manual And Programming Reference

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Vacuum References
SRS-Vacuum Technology References
15
67. Stan Kassela, ““Improving fab productivity with predictive vacuum maintenance””,
Solid State Technology, Feb 2003, p.77.
68. Phil Danielson, ““The Flavor Issue-How to Choose the Right Vacuum Materials””,
R&D Magazine, April 2003, p. 39-40.
69. Philip Lessard, ““Vacuum Issues in the semiconductor Industry, Ion Implantation””,
Vacuum Technology and Coating, June 2003, p. 36.
70. Paul LaMarche and Bob Langley, ““Gas Admission Systems””, Vacuum Technology
and Coating, July 2003, p. 18.
71. Phil Danielson, ““Solving Process Problems at the Molecular Flux Level””, R&D
Magazine August 2003, p. 31.
72. Phil Danielson, ““Anatomy of a PumpDown””, R&D Magazine, June 2004, p. 33.
73. Bob Langley and Paul LaMarche, ““O-Rings: Materials –– Part 1””, Vac. Technology
and Coating, June 2004, p. 24.
74. Patrick Carlucci and David Durkin, ““Selecting Regulators for Specialty Gases:
Understanding and configuration software simplify the task””, Gases and technology,
July/August 2004, p. 43.
75. Phil Danielson, ““Sealing Materials Require a Careful Choice””, R&D Magazine,
August 2004, p. 29.
76. Donald M. Mattox, ““Safety Aspects of Vacuum Processing””, Vacuum Technology
&Coating, January 2005, p. 32.
77. Denise M. McClenathan, et. al., ““Directly Digital Flow Controller””, Anal. Chem.
77(3) (2005) 948. Note: A digital flow controller based on the GasDAC concept
offers fast resonse, linear response and adjustable range. Check out figure 3 for a
schematic of the electronic circuit used to control the solenoid valves.
78. Kimo Welch, ““Variants of the Long Tube Formula””, Vac. Tech and Coating,
February 2005, p. 22.
79. Donald Mattox, ““Deposition Chambers and Vacuum-surface ““Conditioning””””, Vac.
Technology &Coating, February 2005, p.26.
Vacuum System Contamination
1. Inkuyu Chun, et. al. , J. Vac. Sci. Technol. A 14(4) (1996) 2636, ““Outgassing rate
characteristic of a stainless steel extreme high vacuum system””
2. B. B. Dayton, J. Vac. Sci. Technol. A 13(2) (1995) 451, ““Outgassing Rate of
preconditioned vacuum systems after a short exposure to the atmosphere: Outgassing
rate measurements on Viton-A and copper””