Stanford Research Systems RGA100, Operating Manual And Programming Reference

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22 Vacuum References
SRS-Vacuum Technology References
Total Pressure Measurement
1. J. H. Leck, ““Total and Partial Pressure Measurement in Vacuum Systems””, edited by
Blackie and Son Limited, 1989, Glasgow and London,.
2. Stephen P. Hansen, Vacuum and Thin Film, May 1999, p. 24, ““Vacuum Pressure
Measurement””.
3. P.A. Redhead, J. Vac. Sci. Technol. A12(4) (1994) 904, ““History of Ultrahigh
Vacuum Pressure Measurements””.
4. P. A. Redhead, Vacuum 44 (1993) 559, ““UHV and XHV Pressure Measurement””.
5. Tilford, C., JVST A1(2) (1983) 152, ““Reliability of high vacuum measurements””.
6. W. A. Levinson, Semiconductor International, Oct. 1995, p. 165, ““How Good is your
gauge?””.
7. Dick Jacobs, Vacuum&ThinFilm, February 1999, p. 30, ““Advances in Capacitance
Manometers for Pressure Measurement””
8. Tim Studt, ““ Reliability, Cost and Size Demands Dominate New Gauge Designs””,
R&D Magazine, Vacuum Technology Section, May 1996, p. 54.
9. John Sullivan, ““Advances in Vacuum Measurement Almost Mette Past Projections””,
R&D Magazine, August 1995, p. 31.
10. Peter Singer, ““Trends in Vacuum Gauging””, Semiconductor International, March
1992, p. 78.
11. B. R. Kendall et. al. , J. Vac. Sci. Technol. A15(3) (1997) 740, ““Cold Cathode
Gauges for ultrahigh vacuum measurements””.
12. Stephen Hansen and Kathryn Whitenack, ““Pressure measurement and control in
loadlocks””, Solid State Technology, October 1997, p. 151.
13. Eric Bopp, ““Pressure measurement in ion implanters””, Solid State Technology, Feb.
2000, p. 51. Note: Includes a comparison between cold and hot cathode gauge
performance in ion implant applications.
14. B. R. F. Kendall and E. Drubetsky, ““Compact wide range cold cathode gauges””,
JVST A18(4) (2000) 1724.
15. C. P. Grudzien and D. J. Lischer, ““New Enhanced Performance low pressure
Capacitance Manometer””, JVST A 18(4) (2000) 1730.
16. James Lee, ““ The future of Web-Enabled Vacuum Instrumentation””, R&D Magazine,
Oct. 2000, p. 29.
17. Fiona Redgrave, ““How to choose a vacuum gauge””, Vacuum Solutions,
November/December 2000, p.50.