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129
Z550
Operation Manual
S
E
CT
ION 3
Se
tting
the
Detail
ed Co
nditio
n
s
SECTION 3
Setting Measurement Conditions (Expert Menu)
Filter
The profile data can be made smoother if it is infected with noise.Smoothing is performed in the
position direction.
The sampling period varies depending on the filter processing.
Noise Removal
This is used to prevent height measurement errors caused by irregular reflection. Images with
less than the specified number of pixels will be regarded as noise and excluded from the
measurement.
Option
Meaning
None (Set at
shipment)
No smoothing.
Average 2, 4,8, 16,
32, 64
Smoothing is performed using the average value of adjacent data. The values to
the left indicate the number of data to be averaged over.
Median
1, 2, 3
Smoothing is performed using the median value of adjacent data.
It is effective in removing spikes of noise.
Option
0 pixel, 1pixel (set at shipment), 2 pixels, 3 pixels, 4 pixels, 5 pixels, 6 pixels,
7 pixels
An image generated through diffused
reflection is wrongly measured (1 pixel).
Specify three pixels or less to be treated
as noise in order to measure the height
accurately.
operation.book Page 129 Monday, June 6, 2005 10:19 AM