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8-426
EAXA board failure
(1)Reset the alarm.(In case of major alarm, turn the power OFF then back
ON.)
(2)If the alarm occurs again, replace the EAXA board. Save the CMOS.BIN
before replacing the board to be safe.
4360
WAFER
ALIGNMENT
ERROR(SERVO)
Connection failure
Check the connection of prealigner.
4362
POWER SUPPLY
READY
ERROR(SERVO)
Connection failure
(1)Reset the alarm.(In case of major alarm, turn the power OFF then back
ON.)
(2)If the alarm occurs again, check the connection and inserting state of the
following cables and connectors.
·EAXA-CN501 to 506,CN510
·EAXB-CN531,532,533
·Amplifier-CN581,582
·Converter-CN551,552A,552B
EAXA board failure
(1)Reset the alarm.(In case of major alarm, turn the power OFF then back
ON.)
(2)If the alarm occurs again, replace the EAXA board. Save the CMOS.BIN
before replacing the board to be safe.
Software operation
error occurred
(1)Reset the alarm.(In case of major alarm, turn the power OFF then back
ON.)
(2)If the alarm occurs again, save the CMOS.BIN in maintenance mode, and
then contact your Yaskawa representative about occurrence status
(operating procedure).
Alarm
Number
Alarm Name
Sub
Code
Meaning
Cause
Remedy