E1200 HT 260-3
1BIntroduction
23.04.07
00401010_41087
2-3
2.1.3
Operating Data
2.1.3.1
Ambient Air
particle generation
max. 10 particles > 0.5 µm/m
3
air
admissible ambient temperature
+5 °C to +40 °C
admissible max. rel. humidity
50 % at max. 40 °C
1
2.1.3.2
Wafers
Use only specified wafers.
The maximum useable wafer diameter is determined by the following factors:
—
the inside diameter of the process tube
—
the process boat and
—
the loading machine.
The maximum wafer thickness is determined by the slot width within the process boats
as follows:
wafer thickness = slot width within boat - slot tolerance.
The agreed minimum wafer thickness is stated in the specification.
The wafers must be free of contamination. No foreign atoms which could react with the
wafer under process conditions may contaminate the process tube.
2.1.3.3
Thermocouples
For data on platinum-rhodium-platinum-thermocouples (option), refer to the fixpoint
table in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
For data on nickel-chrome-nickel-thermocouples (option), refer to chapter
12.10 Suppliers' Documents, page 12-4.
2.1.3.4
Process Boat
The process boat must be free of contamination. No foreign atoms which could react
with the wafer under process conditions may contaminate the process tube.
The process boat must be cleaned or exchanged according to the standards listed in
chapter 10.14 Process Dependent Measures, page 10-42.
1
Ambient temperature and humidity specifications according to DIN EN 60204-1 1997
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...