CENTROTHERM E1200 HT 260-3, Operating Instructions Manual

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E1200 HT 260-3
3BFunctional Description
23.04.07
4-8
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4.2.2 Process Tube
Each stack of the horizontal furnace has a heating cassette with a process tube. The
thermochemical processing happens within this process tube. Depending on
temperature and type of process, the process tube is made of quartz, silicon carbide,
metal or ceramics. For options of your equipment, refer to the horizontal furnace
overview in chapter 12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
4.2.3 Tube Closure
The tube closure is used to close the process tube in the toxic gas exhaust (TGA).
Depending on the processing the process tube, the following tube closures are used in
the system:
—
stopper
—
closed tube
—
cold zone
—
vacuum
The rear side of the process tube is made in accordance with the process the tube is
intended for.
The process tube is tapered to a socket. In atmospheric processes, process gases are
injected through the socket. In vacuum processes, the vacuum inside the process tube
is generated via the socket.
In PECVD processes, a back flange closes the process tube.
For options of your equipment, refer to the horizontal furnace overview in chapter
12.2 Drawings, Circuit Diagrams, Overviews, page 12-1.
4.2.4 Power Electronics
The power electronics are installed below the first stack of the horizontal furnace. An
air cooling cycle is used to dissipate the waste heat arising from the transformers, see
chapter 4.2.5 Cooling System, page 4-9.
A direct water cooling system is used to dissipate the heat arising from the solid state
relays.