E1200 HT 260-3
9BPreventive Maintenance
23.04.07
00401010_41087
10-5
10.4
Furnace Logbook
centrotherm recommends that you keep a furnace log book. All preventive
maintenance work carried out is then logged in this book.
Keeping a furnace logbook assists the service and preventive maintenance staff in
troubleshooting.
The following information must be entered into the furnace log book: date, preventive
maintenance work carried out, error occurrences and name of the responsible
operators.
The furnace logbook must also document all changes that have been made in
deviation from the operating instructions regarding preventive maintenance intervals or
the use or operation of the equipment.
The performance of services on guarantee terms can be made contingent on the
accuracy and completeness of the furnace logbook.
10.5
Preventive Maintenance Intervals
Time Period
Activity
check process boat contacts
remove broken wafer parts
check protocol entries at the cell controller
daily measures
check the zone heating current on the CMI operating
panel
weekly measures
check the distributor cabinet for overtemperature and
function of the fan (CAN control) (option)
check the distributor cabinet for overtemperature and
function of the fan (19" rack) (option)
compare actual and setpoint temperature display at
CESAR control computer
check assembly groups of the loading box
check filter of the laminar flow box
check toxic gas exhaust
check horizontal furnace
check gas cabinet
check pneumatic equipment
measures every two weeks
clean the condensate line
monthly measures
check pneumatic functions
check process tube
check vertical lift axes (built up to 05/2003)
carry out temperature profiling of the heating cassette
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...