E1200 HT 260-3
8BMaintenance
23.04.07
9-36
00401010_41087
9.3.5.2
Frozen Setpoint/Actual Value Display at the MFC Rack (Option)
1. Check if mains switch on the fuse card is switched on.
2. Check the fuses of the transformer PCB in the MFC.
3. Check if all connectors are plugged in correctly on the rear wall of the MFC rack.
4. Measure setpoint/actual value voltage on the rear wall of the MFC, max. gas flow
velocity = 5VDC.
5. Check transformer PCB in the MFC.
9.3.5.3
Inoperative MFC
1. Check if the gas flow velocity setpoint for this gas line is displayed at the mass flow
controller (MFC). (optional)
2. Check if different gas flow velocities can be set and displayed. Is so, the MFC is
damaged and needs to be replaced, see chapter 9.10 Working on the Gas
System, page 9-65.
9.3.5.4
Pneumatic Valves Do Not Switch (CAN Control)
1. Check if all connectors are plugged in correctly on the front side of the CESAR
control computer.
2. Check the compressed air resp. nitrogen hoses between solenoid valve and
pneumatic valves.
9.3.5.5
Pneumatic Valves Do Not Switch (19" Rack)
Check if the LED for these gas lines, which is located at the MFC rack relay board
(option), lights up. If the LED does not light up:
—
Check if mains switch on the fuse card is switched on.
—
Check the fuses of the transformer PCB in the MFC.
—
Check if all connectors are plugged in correctly on the rear wall of the MFC rack.
—
Check if all connectors are plugged in correctly on the front side of the CESAR
rack.
—
Check if the solenoid valves in the toxic gas exhaust are operative.
—
Check the pneumatic hoses from solenoid valve to the pneumatic valves.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...