E1200 HT 260-3
Table of Contents
23.04.07
00401010_41087
4.1.1
Transport Box Storage.......................................................................................................... 4-3
4.1.2
Loading Box .......................................................................................................................... 4-3
4.1.3
Wafer Transfer System (WTS).............................................................................................. 4-3
4.1.4
Loading Trolley ..................................................................................................................... 4-4
4.1.5
Slider ..................................................................................................................................... 4-4
4.1.6
Lift and Storage..................................................................................................................... 4-4
4.1.7
Loading Machine................................................................................................................... 4-5
4.1.8
Process Boat......................................................................................................................... 4-5
4.1.9
Laminar Flow Box ................................................................................................................. 4-5
4.2
Horizontal Furnace..................................................................................................................... 4-6
4.2.1
Heating Cassette .................................................................................................................. 4-6
4.2.2
Process Tube........................................................................................................................ 4-8
4.2.3
Tube Closure......................................................................................................................... 4-8
4.2.4
Power Electronics ................................................................................................................. 4-8
4.2.5
Cooling System..................................................................................................................... 4-9
4.3
TEOS Cabinet .......................................................................................................................... 4-11
4.4
Gas Cabinet ............................................................................................................................. 4-13
4.4.1
Synthesis Steam Generator................................................................................................ 4-13
4.4.2
Bubbler System................................................................................................................... 4-14
4.4.3
Flaring Unit.......................................................................................................................... 4-14
4.4.4
Control Elements in the Door.............................................................................................. 4-14
4.5
Distributor Cabinet ................................................................................................................... 4-15
4.6
Vacuum System ....................................................................................................................... 4-15
4.7
Transformer Box ...................................................................................................................... 4-16
4.8
Exhaust System ....................................................................................................................... 4-16
4.8.1
Toxic Gas Exhaust.............................................................................................................. 4-16
4.8.2
Exhaust Suction Box in the Gas Cabinet............................................................................ 4-16
4.9
Display and Operating Elements ............................................................................................. 4-16
4.9.1
Signal Lamp and Horn ........................................................................................................ 4-16
4.9.2
Operating Panel .................................................................................................................. 4-18
4.9.3
Buttons on the Touchscreen ............................................................................................... 4-19
4.9.4
User Interface of the CMI Computer................................................................................... 4-20
4.9.4.1
CESAR Control Computer ............................................................................................. 4-21
4.9.4.2
centrotherm Machine Safety (CMS) .............................................................................. 4-21
4.9.5
Cell Controller ..................................................................................................................... 4-22
4.9.5.1
centrotherm cell control Recipe Manager (CCC-RM).................................................... 4-22
4.9.5.2
ProtGraf ......................................................................................................................... 4-22
4.10
Process Description ................................................................................................................. 4-23
4.10.1
Process Flow Oxidation/Diffusion/Annealing ...................................................................... 4-23
4.10.2
Process Flow LPCVD/PECVD ............................................................................................ 4-24
5
Transport................................................................................................................................... 5-1
5.1
Special Safety Measures ........................................................................................................... 5-1
5.2
Packaging................................................................................................................................... 5-1
5.3
Technical Instructions for Transport........................................................................................... 5-2
5.4
Incoming Inspection ................................................................................................................... 5-3
5.4.1
Scope of Delivery.................................................................................................................. 5-3
5.4.2
Transport Damages .............................................................................................................. 5-3
5.5
Storage Measures...................................................................................................................... 5-3
6
Assembly .................................................................................................................................. 6-1
6.1
Preparing the Installation Site .................................................................................................... 6-1
6.2
Equipment Check....................................................................................................................... 6-1
6.3
Installation .................................................................................................................................. 6-2
7
Commissioning and Decommissioning................................................................................. 7-1
7.1
Preparation for Initial Startup ..................................................................................................... 7-1
7.2
Initial Startup .............................................................................................................................. 7-1
7.3
Startup........................................................................................................................................ 7-2
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...