E1200 HT 260-3
Table of Contents
23.04.07
00401010_41087
9.8.6
Adjusting the Flat Aligner .................................................................................................... 9-58
9.8.7
Adjusting the Slider ............................................................................................................. 9-59
9.8.8
Adjusting the Grip Head...................................................................................................... 9-60
9.8.9
Adjusting Light Sensors and Limit Switches (Built up to 05/2003) ..................................... 9-61
9.8.10
Adjusting Light Sensors and Limit Switches (Built later than 06/2003) .............................. 9-62
9.9
Aligning the Softlanding-System (SLS).................................................................................... 9-63
9.10
Working on the Gas System .................................................................................................... 9-65
9.10.1
Flushing Process Gas Lines for Atmospheric Processes................................................... 9-66
9.10.2
Flushing Process Gas Lines for Vacuum Processes.......................................................... 9-67
9.10.3
Replacing Assembly Groups in the Gas System ................................................................ 9-68
9.11
Leak Test.................................................................................................................................. 9-69
9.11.1
Pressure Test for Closed Tube Systems ............................................................................ 9-69
9.11.2
Leakage Test for Vacuum Systems.................................................................................... 9-69
9.11.2.1
Test for External Leaks.................................................................................................. 9-69
9.11.2.2
Test for Internal Leaks ................................................................................................... 9-70
9.12
Temperature Profiling............................................................................................................... 9-71
9.12.1
Setting for the Temperature Profiling.................................................................................. 9-71
9.12.2
Manual Control of Temperature Profiling............................................................................ 9-72
9.12.3
Temperature Profiling with a Recipe................................................................................... 9-73
9.12.4
Checking the Profiling Table ............................................................................................... 9-73
9.12.5
Checking the Calibration Points of the Thermocouple ....................................................... 9-74
9.12.6
Entering the Calibration Points of the Thermocouple ......................................................... 9-75
10
Preventive Maintenance ........................................................................................................ 10-1
10.1
Safety Notes............................................................................................................................. 10-1
10.2
Notes on Cleaning and Preventive Maintenance..................................................................... 10-3
10.3
Preventive Maintenance Checklist........................................................................................... 10-4
10.4
Furnace Logbook ..................................................................................................................... 10-5
10.5
Preventive Maintenance Intervals............................................................................................ 10-5
10.6
Daily Procedures...................................................................................................................... 10-7
10.6.1
Checking the Process Boat Contacts ................................................................................. 10-7
10.6.2
Removing Broken Wafer Parts ........................................................................................... 10-7
10.6.3
Checking the Protocol Entries at the Cell Controller........................................................... 10-7
10.6.4
Checking the Zone Heating Current on the CMI Operating Panel ..................................... 10-7
10.7
Weekly Procedures .................................................................................................................. 10-8
10.7.1
Checking the Distributor Cabinet Overtemp and Fan Function (CAN Control) ................ 10-10
10.7.2
Checking the Distributor Cabinet Overtemp. and Fan Function (19"-Rack)..................... 10-10
10.7.3
Comparing Actual and Setpoint Temp Display at CESAR Control Computer.................. 10-11
10.7.4
Checking the Assembly Groups of the Loading Box ........................................................ 10-12
10.7.5
Checking the Filter of the Laminar Flow Box .................................................................... 10-12
10.7.6
Checking the Toxic Gas Exhaust...................................................................................... 10-12
10.7.7
Checking the Horizontal Furnace...................................................................................... 10-13
10.7.8
Checking the Gas Cabinet ................................................................................................ 10-13
10.7.9
Checking the Pneumatic Equipment................................................................................. 10-14
10.8
Procedures Every Two Weeks............................................................................................... 10-14
10.8.1
Cleaning the Condensate Line.......................................................................................... 10-15
10.8.1.1
Dismounting Components ........................................................................................... 10-16
10.8.1.2
Cleaning the Components .......................................................................................... 10-20
10.8.1.3
Installing the Components ........................................................................................... 10-21
10.9
Monthly Procedures ............................................................................................................... 10-22
10.9.1
Checking the Pneumatic Functions .................................................................................. 10-22
10.9.2
Checking the Process Tube.............................................................................................. 10-22
10.9.3
Checking the Vertical Lift Axes (Built up to 05/2003) ....................................................... 10-23
10.9.4
Carrying Out Temperature Profiling of the Heating Cassette ........................................... 10-25
10.10
Eight Weeks Procedures........................................................................................................ 10-25
10.10.1
Replacing the Condensate Line Components .................................................................. 10-25
10.11
Quarterly Procedures ............................................................................................................. 10-26
10.11.1
Checking the Sensors of the Loading Box........................................................................ 10-26
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...