E1200 HT 260-3
8BMaintenance
23.04.07
00401010_41087
9-63
9.9
Aligning the Softlanding-System (SLS)
CAUTION!
Process tube and paddle must be accurately aligned in parallel to avoid distortion of
the longboats in the SLS. This helps avoid a wafer jam in the process boat, which can
lead to broken wafers.
If a CVD tube is installed in one of the stacks, start the alignment there, because the
flange is fixed.
1. Check the loading machine shafts with a spirit level.
2. Check the paddle for correct shape.
3. The paddle receptacle must be mounted on the paddle as follows:
—
right-angled towards the shaft
—
5 mm from the shaft's end
—
150 mm distance between the supports
—
the adjusting screws screwed out by 18 mm
4. Manually tighten the screws.
5. Hang the paddle into the centerings in the loading machine.
6. Use a machine spirit level and the knurled screw to horizontally align the paddle at
the support. Tighten the locknut at the knurled screw. Check that the paddle is
firmly fixed.
7. Move the paddle tip to the opening of the tube. Loosen the four screws of the
support and place the paddle tip in central position towards the tube. Retighten the
screws and check the center position.
8. Move the loading machine back to position 0 and measure the distance between
paddle tip and loading machine guiding shaft.
9. Use the two screws at the support's back to adjust the paddle so that the
measured distance is the same over the whole paddle length. Manually tighten the
four screws.
10. Place an empty boat onto the paddle and manually slide the paddle into the
process tube. Check if the upper edge of the process boat has the same distance
towards the process tube at all four corners. Use a flashlight. If necessary, correct
the position of the process tube by dislocating or lifting the heating cassette.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...