E1200 HT 260-3
2BSafety
23.04.07
00401010_41087
3-11
The specification sheets regarding the applied gases are contained in chapter 12.8 DIN
Safety Datasheets, page 12-3. When handling the gases, observe the notes in the
respective specification sheets.
Phosphoryl trichloride (POCl
3
) is very toxic when it is breathed in, causes serious
causticization and is noxious when it is swallowed. Unpleasant odors can indicate
danger. Leave the danger zone and inform the person responsible for the system and
the safety officer.
POCl
3
reacts fiercely with water. Never use water to mop it up. Leave the danger zone
and inform the person responsible for the system and the safety officer.
Components which are contaminated with hydrochloric acid or phosphoric acid can
damage the respiratory system, the eyes and the skin. Observe the corresponding
material safety data sheets and in-house operating instructions when using these
substances.
Avoid contact with the process gases and reaction substances. Always wear suitable
protective gloves and safety glasses/face screen. When working at the gas cabinet,
e.g. when transporting/exchanging the POCl
3
bottles, always wear ambient air
independent respiratory equipment, chemicals resistant protective clothes and safety
shoes.
Never touch the face and especially the eyes with the gloves.
Silane (SiH
4
) will ignite when in contact with air. Store containers at < 50 °C in a well
ventilated location and secure against accidents. If silane escapes, close the gas outlet
and ensure sufficient ventilation. Cool the container with water while remaining in a
protected position.
Dichlorethylene (DCE) is highly flammable and harmful to health when breathed in. Be
extra cautious when replacing the DCE bottle. Wear a respirator with multi-range filter
and safety gloves. DCE and ammonia are water polluting. In case of an accident, take
measures to protect the groundwater.
Burning ammonia (NH
3
) emits hazardous substances. Store containers at < 50 °C in a
well ventilated location and secure against accidents. Should ammonia escape, close
the gas outlet and use water mist or a fine water spray to clear the dangerous vapors.
Ethyl silicate (TEOS) is flammable and harmful to health when breathed in. It is
conductive to fire and may react fiercely with combustible materials. Store containers at
< 50 °C in a well ventilated location and secure against accidents. If ethyl silicate
escapes, immediately put on the respirator. Stop the gas outlet and provide sufficient
ventilation. Cool the container with water while remaining in a protected position.
Oxygen (O
2
) can cause fire and explosions and can cause explosive reactions in
combination with combustible materials and gases. High concentrations can cause
dizziness and clouding of consciousness. Store containers at < 50 °C in a well
ventilated location and secure against accidents. Never store close to explosive or
combustible material! If oxygen escapes, close the gas outlet and ensure sufficient
ventilation. Cool the container with water while remaining in a protected position.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...