E1200 HT 260-3
9BPreventive Maintenance
23.04.07
00401010_41087
10-39
WARNING - Toxic substances!
Only trained workers may use hydrofluoric acid for cleaning.
Always wear protective clothing, respirator and safety gloves when handling
hydrofluoric acid.
7. Clean the HF contact tip using DI-water. In case of high contamination, use
hydrofluoric acid to clean the HF contact tip.
8. Check the silver coating of the HF contact tip for defects, flaking and scratches.
Replace the HF contact tip if it is damaged.
9. Screw the cleaned or new HF contact tip onto the HF lance.
10. Check the red O-ring at the lance base for damage and replace, if necessary.
11. Install the HF lance with the tube case and the lance base.
12. To check the second HF lance, proceed as described in point 3. to 11.
13. Adjust the HF lances.
10.12.14.2 Checking the Main, Butterfly and Softpump Valve
1. Dismount the main, butterfly and softpump valve of the vacuum system.
2. Visually inspect them for contamination and damages using a flashlight. Replace
damaged valves.
Never use metal tools to clean the main, butterfly and softpump valve.
Only use DI water, lint-free cleaning cloths and a metal-free bottle brush to clean the
main, butterfly and softpump valve.
3. Clean the main, butterfly and softpump valve.
4. Blow through the main, butterfly and softpump valve to dry them.
Summary of Contents for E1200 HT 260-3
Page 1: ...Operating Instructions for Horizontal Furnace Equipment E1200 HT 260 3 Version 1 0 1_41087 11 ...
Page 2: ...E1200 HT 260 3 23 04 07 00401010_41087 ...
Page 4: ...E1200 HT 260 3 Document Information 23 04 07 00401010_41087 ...
Page 16: ...E1200 HT 260 3 Index 23 04 07 00401010_41087 ...
Page 18: ...E1200 HT 260 3 List of Figures 23 04 07 00401010_41087 ...
Page 20: ...E1200 HT 260 3 List of Tables 23 04 07 00401010_41087 ...
Page 26: ...E1200 HT 260 3 0BOperating Instruction Remarks 23 04 07 1 6 00401010_41087 ...
Page 34: ...E1200 HT 260 3 1BIntroduction 23 04 07 2 8 00401010_41087 ...
Page 50: ...E1200 HT 260 3 2BSafety 23 04 07 3 16 00401010_41087 ...
Page 78: ...E1200 HT 260 3 4BTransport 23 04 07 5 4 00401010_41087 ...
Page 180: ...E1200 HT 260 3 8BMaintenance 23 04 07 9 76 00401010_41087 ...
Page 228: ...E1200 HT 260 3 10BSpare and Wearing Parts 23 04 07 11 2 00401010_41087 ...